Composite film-based frequency-adjustable surface acoustic wave gyro

Abstract

The invention discloses a composite film-based frequency-adjustable surface acoustic wave gyro, which comprises a magnetostrictive substrate, a piezoelectric film, a surface acoustic wave resonator, a surface acoustic wave detector, a metal dot matrix, a phase-shift network and a radio-frequency amplifier. The piezoelectric film is covered on the magnetostrictive substrate; the surface acoustic wave resonator, the surface acoustic wave detector and the metal dot matrix are arranged on the surface of the piezoelectric film; the surface acoustic wave resonator, the phase-shift network and the radio-frequency amplifier form a surface acoustic wave oscillator together; the surface acoustic wave resonator and the surface acoustic wave detector are arranged in a mutually perpendicular crossing way; the surface of the piezoelectric film at the intersection of the surface acoustic wave resonator and the surface acoustic wave detector forms a blank; and the metal dot matrix is positioned at the blank. The gyro has the advantages of simple and compact structure, low cost, easy and simple operation and the like, can adjust the working frequency of the surface acoustic wave gyro in a certain range, can realize matching of the working frequency of the oscillator and the working frequency of the detector, and effectively improves the sensitivity and accuracy of the surface acoustic wave gyro.

Description

technical field [0001] The invention mainly relates to the design field of a micromechanical gyroscope, in particular to a surface acoustic wave gyroscope. Background technique [0002] Micromechanical gyroscopes have the characteristics of small size, light weight, low cost, low power consumption, and mass production. They can be widely used in aviation, aerospace, weapons, automobiles, medical, consumer electronics and other fields, and have huge market potential. It has become an important direction for the development of inertial gyroscopes. Micromechanical gyroscopes of various structures emerge in endlessly in the world, and their common feature is that there are two vibration directions perpendicular to each other, namely, the vibration excitation direction and the detection vibration direction caused by Coriolis force. Therefore, most micromechanical gyroscopes have a three-dimensional structure with a suspended vibration structure, which has poor shock and vibratio...

AI Technical Summary

Problems solved by technology

Due to the limitation of processing capacity and the inevitable manufacturing errors in the processing process, as well as the change of internal and external conditions, it is difficult to match the actual frequency of the oscillator and detector

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