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Two-liquid acid etching liquid oxidant

A technology of acidic etching solution and oxidant, applied in surface etching compositions, chemical instruments and methods, etc., can solve the problems of side corrosion, low amount of dissolved copper, poor stability, etc., and achieve high amount of dissolved copper, small side corrosion, High stability effect

Inactive Publication Date: 2010-06-30
广东奥美特集团有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Especially for printed circuit board etching, at present, copper chloride system acidic etching solution has precipitation during use, severe side corrosion, low dissolved copper, and poor stability

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0013] Present embodiment content is: sodium chlorate 35%, sodium chloride 8%, additive is the mixture of sodium sulfate and sodium carbonate 0.25%, tap water 56.75%, sodium chloride is industrial grade, purity 99%. Sodium chlorate is of industrial grade with a purity of over 99%. Add the quantitative raw materials into the stirring tank and stir until the raw materials are completely dissolved.

Embodiment 2

[0015] The content of this embodiment is: 37% of sodium chlorate, 6% of sodium chloride, 0.15% of the mixture of sodium sulfate and sodium carbonate as the additive, and 56.85% of soft water. Sodium chloride is technical grade with a purity of 99%. Sodium chlorate is of industrial grade with a purity of over 99%.

Embodiment 3

[0017] The content of this embodiment is: 35.32% of sodium chlorate, 6.5% of sodium chloride, 0.18% of the mixture of sodium sulfate and sodium carbonate as additives, and 58% of deionized water. Sodium chloride is technical grade with a purity of 99%. Sodium chlorate is of industrial grade with a purity of over 99%.

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PUM

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Abstract

The invention relates to a two-liquid acid etching liquid oxidant used for all kinds of copper chloride etching systems. The two-liquid acid etching liquid oxidant contains the following components by weight percent: 35-37 percent of sodium chlorate, 6-8 percent of sodium chloride, 0.15-0.25 percent of additive and 55-58 percent of water. The invention has the advantages that the amount of dissolved copper is large, the side etching is small, no sediment is produced during use and the stability is high.

Description

technical field [0001] The invention relates to an etching solution composition, in particular to a two-component acidic etching solution oxidizer used in various cupric chloride etching systems. Background technique [0002] At present, metals or alloys such as chromium, silver, molybdenum, copper, aluminum, palladium, platinum, and chromium are often used as conductive materials in semiconductor manufacturing or flat-panel display manufacturing. In the past, etching compositions containing acids and oxidizing agents were often used to etch aluminum, chromium, or silver metals and their alloys, but the degree of etching required and the types of metals to be etched are also different. Therefore, the best etching effect is mostly obtained by properly selecting the types of acids and oxidizing agents, and then adjusting the appropriate concentration. Especially for printed circuit board etching, at present, copper chloride system acid etching solution has precipitation durin...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C09K13/00C23F1/18
Inventor 林春涛
Owner 广东奥美特集团有限公司
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