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Preparation method of graphic organic field-effect transistor active layer

A graphic and organic field technology, applied in the field of organic electronics, can solve problems such as poor repeatability, unfavorable process, and reduced device performance, and achieve the effect of simple process and low cost

Inactive Publication Date: 2010-07-21
INST OF MICROELECTRONICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

These methods either have a low yield and reduce device performance, or have poor repeatability, which is not conducive to subsequent processes

Method used

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  • Preparation method of graphic organic field-effect transistor active layer
  • Preparation method of graphic organic field-effect transistor active layer
  • Preparation method of graphic organic field-effect transistor active layer

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Embodiment Construction

[0025] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in conjunction with specific embodiments and with reference to the accompanying drawings.

[0026] The present invention is a patterned highly hydrophobic adhesion layer formed on the surface of a hydrophilic insulating layer or a dielectric layer by photolithographic stripping, vapor deposition, stamp printing or inkjet printing, so that the deposited organic semiconductor solution automatically migrates to the Areas of highly hydrophobic adhesion layer, duplicating defined graphics. Then the solvent is evaporated by baking to form an organic semiconductor film to fix the designed pattern. One of the key requirements is that the insulating layer or dielectric layer must be hydrophilic, but the adhesion layer must be highly hydrophobic. Only in this way can the organic semiconductor solution be able to reproduc...

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Abstract

The invention discloses a preparation method of a graphic organic field-effect transistor active layer, which comprises the steps of: step 1. forming a high-hydrophobicity adhesion layer graph on the surface of a hydrophilic insulating layer or dielectric layer; step 2. depositing organic semiconductor solution on the surface of the insulating layer or dielectric layer formed with the high-hydrophobicity adhesion layer graph, and leading the organic semiconductor solution to automatically move into an area without a high-hydrophobicity adhesion layer; and step 3. baking to remove solvent, and forming a graphic organic semiconductor film. Due to high surface energy, liquid-phase material can not attach on the surface of the high-hydrophobicity adhesion layer, but naturally moves to the place without the high-hydrophobicity adhesion layer, so that the graph with the high-hydrophobicity adhesion layer can be copied. The method has simple technical steps, realizes self-aligning, and is low in cost.

Description

technical field [0001] The invention relates to the technical field of organic electronics, in particular to a method for preparing an active layer of a patterned organic field effect transistor. Background technique [0002] With the continuous deepening of information technology, electronic products have entered every aspect of people's life and work; in daily life, people's demand for low-cost, flexible, low-weight, and portable electronic products is increasing; traditional inorganic semiconductor-based It is difficult for devices and circuits of materials to meet these requirements, so organic microelectronics technology based on organic polymer semiconductor materials that can realize these characteristics has received more and more attention under this trend. [0003] Patterning the active layer is an essential step to realize organic semiconductor applications. In traditional microelectronics processing, photolithography is generally used to pattern the semiconducto...

Claims

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Application Information

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IPC IPC(8): H01L51/40
Inventor 商立伟刘明姬濯宇刘舸刘兴华柳江
Owner INST OF MICROELECTRONICS CHINESE ACAD OF SCI