Silicon-based optical wave guide temperature sensor based on Mach-Zehnder structure

A technology of temperature sensor and silicon-based optical waveguide, which is applied in the direction of physical/chemical change thermometers, thermometers, instruments, etc., can solve the problems of temperature measurement, electrical sensing aging damage, etc., achieve small size and increase anti-interference ability , the effect of high sensitivity

Inactive Publication Date: 2010-08-11
INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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Problems solved by technology

[0002] In the field of temperature sensing, industrial production and daily life mainly use contact electrical sensors for temperature sensing, such as thermocouples, thermal resistance, etc., but these technologies are difficult to operate in harsh environments such as high temperatur

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  • Silicon-based optical wave guide temperature sensor based on Mach-Zehnder structure
  • Silicon-based optical wave guide temperature sensor based on Mach-Zehnder structure
  • Silicon-based optical wave guide temperature sensor based on Mach-Zehnder structure

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[0031] See figure 1 As shown, the present invention provides a silicon-based optical waveguide temperature sensor based on the Mach-Zehnder structure, which uses the sensitivity of its transmission spectrum to temperature to realize temperature sensing, and mainly includes: laser 1, Y-waveguide 2. The first power meter 3, the Mach-Zehnder waveguide structure 4, the second power meter 5, etc.

[0032] The laser 1 used may be a single-mode laser such as a DFB laser or a DBR laser. One end of the Y-shaped waveguide 2 with a splitting ratio of 3dB is the incident waveguide 21 for introducing the incident light wave of the laser 1, and one end of the incident waveguide 21 has a first positive cone 211. The first positive cone 211 of the Y-shaped waveguide 2 is connected to The laser 1 is connected to achieve good coupling efficiency.

[0033] The other two ends of the Y-shaped waveguide 2 are divided into a reference arm waveguide 22 and a sensing arm waveguide 23 to divide the incide...

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Abstract

The invention provides a silicon-based optical wave guide temperature sensor based on a Mach-Zehnder structure, realizing temperature sensing by utilizing the sensitivity of a transmission spectrum thereof to temperature. The silicon-based optical wave guide temperature sensor comprises a laser, a Y-shaped wave guide, a first power meter, a Mach-Zehnder wave guide structure and a second power meter, wherein one end of the Y-shaped wave guide is an incident wave guide, a first positive cone is arranged at one end of the incident wave guide and is connected with the laser through optical fibers, the other two ends of the Y-shaped wave guide are respectively a reference arm wave guide and a sensing arm wave guide, a second positive cone is arranged at one end of the reference arm wave guide of the Y-shaped wave guide, and a third positive cone is arranged at one end of the sensing arm wave guide of the Y-shaped wave guide; the first power meter is connected with the second positive cone through optical fibers; the Mach-Zehnder wave guide structure is connected in the middle of the sensing arm wave guide; and the second power meter is connected with the third positive cone of the sensing arm wave guide through optical fibers.

Description

technical field [0001] The invention relates to a silicon-based optical waveguide temperature sensor, in particular to a silicon-based optical waveguide temperature sensing device based on a Mach-Zehnder structure. Background technique [0002] In the field of temperature sensing, industrial production and daily life mainly use contact electrical sensors for temperature sensing, such as thermocouples, thermal resistance, etc., but these technologies are difficult to operate in harsh environments such as high temperature, high pressure, high humidity, and high electromagnetic interference. get applied. At the same time, in high-temperature, high-humidity or high-corrosion environments, the electrical sensor itself will rapidly age and be damaged, making it impossible to measure the temperature at all. Based on the high stability of optical fiber and the advantages of high temperature resistance, high pressure, high humidity, and strong electromagnetic interference, a variety...

Claims

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Application Information

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IPC IPC(8): G01K11/32
Inventor 满江伟陈伟张红广韩威孙可谢亮祝宁华
Owner INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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