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Bidirectional detection method of Young modulus and Poisson constant by ultrasonic surface wave

A technology of ultrasonic surface wave and Young's modulus, which is applied in the analysis of solids and other directions using sound waves/ultrasonic waves/infrasonic waves

Inactive Publication Date: 2010-11-03
TIANJIN UNIV
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  • Abstract
  • Description
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  • Application Information

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Problems solved by technology

However, for ultra-thin film materials (thickness<500nm), only one parameter of Young's modulus of the sample can be detected by this ultrasonic surface wave method.

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  • Bidirectional detection method of Young modulus and Poisson constant by ultrasonic surface wave
  • Bidirectional detection method of Young modulus and Poisson constant by ultrasonic surface wave
  • Bidirectional detection method of Young modulus and Poisson constant by ultrasonic surface wave

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Embodiment Construction

[0022] The present invention will be described in detail below.

[0023] The two-way ultrasonic surface wave detection method proposed by the present invention can be implemented through the following three steps:

[0024] (1) Ultrasonic surface wave experimental dispersion curve measurement: A short-pulse laser is used to excite a broadband ultrasonic surface wave on the surface of the layered film material sample, and the surface wave signal is collected at two different positions on the surface of the sample through a piezoelectric detector. In this way, the dispersion curve of the ultrasonic surface wave propagating on the layered film material is calculated. figure 1 Shows a schematic diagram of an ultrasonic surface wave excitation and detection experimental system. The short-pulse laser light emitted by the laser 1 is reflected by the prism 2 and focused by the cylindrical mirror 3 to the surface of the sample, which excites ultrasonic surface waves. The piezoelectric dete...

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Abstract

The invention belongs to the technical field of material property detection, and relates to a bidirectional detection method of a Young modulus and a Poisson constant by an ultrasonic surface wave, which is used for detecting a layering thin film material formed on a silicon substrate by isotropic thin film deposition. The detection method comprises the following steps: exciting the wideband ultrasonic surface wave on the surface of a layering thin film material sample sheet by a short-pulse laser; respectively acquiring a surface wave signal in a Si[110] direction and a Si[100] direction of the surface of the sample sheet by a piezoelectric detector to obtain a dispersion curve of the ultrasonic surface wave spreading on the layering thin film material in the directions; and setting a plurality of the Young modulus and the Poisson constants to calculate a plurality of different theoretical dispersion curves, and then fitting an experimental dispersion curve obtained by a test with the theoretical dispersion curves to obtain the theoretical dispersion curve which is closest to the experimental dispersion curve so as to determine the Young modulus and the Poisson constant of the thin film material. The detection method of the invention has the characteristics of fastness, accuracy, nondestructive monitoring and the like.

Description

Technical field [0001] The invention belongs to the technical field of material performance detection, and relates to a method for detecting Young's modulus and Poisson's constant of thin film materials. Background technique [0002] The traditional method of measuring Young's modulus and Poisson's constant of thin films is nanoindentation. However, the nanoindentation method is a destructive detection method, which can cause damage to the film material. For thin films with soft materials, due to the influence of the substrate material, the Young's modulus measured by the nanoindentation method is usually too high, which cannot accurately characterize the performance of the film. [0003] The ultrasonic surface wave testing method is a non-destructive testing method that can test the Young's modulus, Poisson's constant and other mechanical properties of the thin film material, and it will not be affected by the substrate material. A short-pulse laser is used to excite ultrasonic ...

Claims

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Application Information

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IPC IPC(8): G01N29/07G01N29/12
Inventor 肖夏单兴锰刘亚亮
Owner TIANJIN UNIV
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