34 results about "Surface wave excitation" patented technology

This surface wave excitation plasma CVD system, along with feeding a material gas including silicon element by feeding the material gas into a chamber 1 from at least one of an upper surface gas introduction conduit and a side surface gas introduction conduit, also activates the material gas with a surface wave excitation plasma and feeds a process gas which initiates chemical reactions within the material gas into the chamber 1 from a process gas introduction conduit 5. A gas feed aperture of the upper surface gas introduction conduit and/or the side surface gas introduction conduit is provided in a position which is closer to the substrate than the gas feed aperture of the process gas introduction conduit.

The invention discloses a laser acoustic surface wave stress test system, which is mainly comprises an ultrasound surface wave excitation part composed of a short-pulse laser, a spectroscope, a triple prism and a cylindrical convex lens, and an ultrasound surface wave detection part composed of a PVDF piezoelectric film and a high-frequency pre-amplifier. The invention uses the short-pulse laser to generate a high-frequency ultrasound surface wave on the surface of the samples to be tested, a stress value is obtained according to the principle of acoustic elasticity, the PVDF piezoelectric film is served as the receiver of the ultrasound surface wave, fast two-dimensional scanning is realized on the surface of the samples in the way that the PVDF piezoelectric film is fixed, the excitation source and the samples to be tested are in two-dimensional translation motion, the obtained ultrasound surface wave signals are transmitted to an electronic computer, and the measurement of the stress distribution on the surface and the sun-surface of the samples is realized through fast computing and processing by programming according to the principle of acoustic elasticity. The system has the advantages of simple structure and low cost, which can be widely used in the stress distribution measurement on the surface and the sun-surface of metal materials.

The present invention provides a surface wave excitation plasma generator in which surface wave excitation plasma is efficiently generated. A surface wave excitation plasma generator including an annular waveguide and a dielectric tube is provided. The annular waveguide 2 includes an inlet 2a for introducing a microwave M, an end plate 2b for reflecting the microwave M introduced and propagating within the waveguide, and a bottom plate 2c on which slot antennas 2d are formed at a predetermined interval. When the wavelength of the microwave M in the waveguide is λg, the length from position b through positions c, d, e to position f on the bottom plate 2c, i.e. the circumferential length (π×D1) of the annular waveguide, is set as 2 λg, and the positions b, c, d, e, f are spaced apart at an interval of λg/2. Since the slot antennas 2d are arranged at two positions c and e, the interval between these two slot antennas 2d is equal to the wavelength λg in the waveguide.

The invention discloses an array substrate. The array substrate comprises a substrate body, a piezoelectric induction layer which is formed on the substrate body, an acoustic surface wave excitation electrode and an acoustic surface wave receiving electrode which are formed on the piezoelectric induction layer and a photosensitive resistance layer which is formed on the piezoelectric induction layer, and the photosensitive resistance layer is located between the acoustic surface wave excitation electrode and the acoustic surface wave receiving electrode. The invention further discloses a display panel and a display device which comprise the array substrate. The array substrate, the display panel and the display device use the acoustic surface wave excitation electrode and the acoustic surface wave receiving electrode with fast response, high sensitivity and small volume to realize a fingerprint recognition function, and can improve the fingerprint recognition speed and sensitivity.

The invention provides a trace element detection device based on plasma surface wave excitation, which belongs to the field of trace element detection and includes a plasma excitation source generation system, an atomization system, a spectrum detection system and a cooling system. The working gas is injected from the upstream of the discharge tube, and the energy coupling area of ​​the surface wave plasma actuator generates plasma, and the generated surface wave plasma can extend to the outlet of the discharge tube; the liquid sample to be tested is processed by a pneumatic atomization device to form Gas phase sample, the gas phase sample is introduced into the surface wave plasma from the introduction port through the quartz introduction tube, and the elements in the sample to be measured are excited by the surface wave plasma to generate a characteristic spectrum, which is received by the optical fiber probe at the observation window of the spectrum detection and sent to the The spectrometer and the computer analyze the characteristic excitation lines of the sample to be tested to realize the qualitative and quantitative analysis of trace elements in the sample to be tested. The invention can improve the tolerance of microwave plasma to gas phase samples, and the device has simple structure and convenient operation.

To sustain uniform generation of plasma constantly over a large area. In the surface wave excitation plasma processing device, a plasma source includes: a microwave generator, a microwave waveguide and a dielectric block; and a plasma source also includes: a microwave generator, a microwave waveguide and a dielectric block. The lid of a chamber is fixed onto the microwave waveguides in parallel, and the dielectric blocks disposed in the chamber. A reflecting plate is disposed between the dielectric blocks so that electromagnetic waves propagating through the dielectric blocks are prevented from advancing into the counterpart dielectric blocks as reflected waves. Consequently, the plasma sources are controlled independently. Furthermore, a side reflector is disposed at outer circumference of each of the dielectric blocks so that a standing waves of the electromagnetic waves propagating through the dielectric blocks is formed thus forming a large area standing wave mode of surface waves uniformly.

The invention discloses a micro-strip scoop-type feed slit surface wave excitation antenna. The antenna is characterized in that: the surface wave excitation antenna contains a feed unit and a radiation unit; the surface wave excitation antenna is divided into three layers, and an upper layer and a lower layer are metal layers (1) and (3), and a middle part is a dielectric layer (2); the upper metal layer (1) is a micro-strip feed structure of the antenna; a micro-strip feed unit is formed by connection between a 50 omega first micro-strip line (4) and a scoop-type micro-strip (6) through an index gradient micro-strip structure (5); starting from the 50 omega first micro-strip line (4), an excitation signal realizes impedance matching through the index gradient micro-strip structure (5); the scoop-type micro-strip (6) carries out feed on a radiation unit (7) of a rear metal layer, wherein the radiation unit (7) sets three yagi slits in a grounding metal layer (3) so as to realize directed radiation.

A new and comparatively small type of open-ended microwave applicators has been disclosed. They are for example suitable for transmission into and reception from contacting objects such as protruding human bodyparts for inhomogeneity detection by tomographic methods. The applicators according to the invention are of the dielectric-filled open-ended ridged rectangular TE₁₀ type, with an insert filling the ridge and having a higher permittivity than the surrounding space. The shape of the insert can be as a frustrum pyramid towards the opening. The overall design promotes narrow beamwidths and minimises nearfields and surface wave excitation.

The invention discloses surface wave excitation and long-distance transmission structures based on metamaterials. The first structure, the second structure and the third structure are free space coupling structures, and the fourth structure is an end face coupling structure. All the four structures do not need to coupled through lenses high in refractive index, integration of optical elements is facilitated, meanwhile, the propagation distance of light can reach millimeter magnitude, and the structures can be widely used in the optical elements. The structures are simple, SPPs are easily coupled under the circumstance that no lens high in refractive index is used, integration of the optical elements is facilitated, meanwhile, the propagation distance of the light can reach the millimeter magnitude, and the structures can be widely used in the optical elements.

The embodiment of the application discloses a surface wave excitation device. The surface wave excitation device in the embodiment of the application includes a metal waveguide, a coupling part, a feeding part and a transmission line. The metal waveguide sleeves the transmission line. The coupling part is arranged inside the metal waveguide. The metal waveguide and the transmission line are coaxial. The feeding part is connected with the coupling part. The coupling part is arranged in parallel with the transmission line. A gap is formed between the coupling part and the conductor of the transmission line. Electromagnetic waves are propagated from the feeding part to the coupling part and coupled through the coupling part to the surface of the transmission line, so as to transmit surface waves. The surface wave excitation device in the embodiment of the application is used to reduce the radiation loss of surface waves.

A high-frequency heating device (100) that comprises: a first surface wave excitation body (103a) and a second surface wave excitation body (103b); a first high-frequency power supply part (110a) anda second high-frequency power supply part (110b); and a high-frequency power generation part (120). The first surface wave excitation body (103a) and the second surface wave excitation body (103b) face each other so as to sandwich an object to be heated (102). The high-frequency heating device (100) can thereby heat and scorch both surfaces of the object to be heated (102) without using a heater or the like.

The invention provides a directional broadband efficient surface wave excitation device. The directional broadband efficient surface wave excitation device comprises an input matching section, an excitation section and a cover plate, wherein the input matching section comprises a coaxial connector, a coaxial-ridge waveguide switch and a ridge waveguide-waveguide switch; the excitation section comprises a downwards excitation section and an upwards excitation section. Non-contact between an inner core of the coaxial connector and the single ridge waveguide can be realized by opening a pore on a ridge of the single ridge waveguide. The excitation section adopts a two-stage structure to realize the broadband efficient surface wave excitation. Compared with the existing excitation device, the excitation device provided by the invention obviously improves the bandwidth performance and excitation efficiency, and can flexibly move on the surface of the surface wave and enhance the flexibility of application. The directional broadband efficient surface wave excitation device provided by the invention is wide in frequency band, high in surface wave excitation efficiency, compact in structure, easy in processing and low in cost; a surface wave wireless transmission system is formed by the directional broadband efficient surface wave excitation device and the surface of the surface wave, so that the excitation device can flexibly access and remove from the surface of the surface wave, thus the wireless fast transmission application requirement for high speed big data by the millimeter wave frequency band in the future can be satisfied.

The invention discloses a central surface acoustic wave heating element, which mainly comprises a piezoelectric substrate (11), interdigital electrode structures and a sleeve base (3), wherein the front end of the piezoelectric substrate (11) is tip-shaped, and one or more interdigital electrode structures are arranged on the wall of the rear end of the piezoelectric substrate (11); the sleeve base (3) is sleeved at the rear end of the piezoelectric substrate (11), and the interdigital electrode structuresarepositioned in the sleeve base (3); and two electrodes are arranged at the bottom end of the sleeve base (3) and are electrically connected with bus bars of the interdigital electrode structures respectively. The central type acoustic surface wave heating element is used for heating non-combustible cigarettes and has the advantages of being high in heating efficiency, good in heat uniformity, high in safety coefficient and the like, and an acoustic surface wave excitation source does not make contact with a cigarette core.

The invention relates to a Bloch surface wave exciter based on nano-particles, used for a spectrograph. The Bloch surface wave exciter comprises a glass substrate and a Bragg reflection unit arranged on the glass substrate, the Bragg reflection unit is formed by alternately stacking high-refractive-index dielectric layers and low-refractive-index dielectric layers, the top layer of the Bragg reflection unit is a defect layer, and nanoparticles are arranged on the surface of the top layer. The invention also provides a corresponding spectrometer and a measuring method thereof. According to the Bloch surface wave exciter, the in-plane size of a spectrograph can reach the nanoscale, and small light source signals can be measured. In addition, the preparation method is simple and low in cost. In addition, when the spectrometer is used, the requirement for the incident spectrum is simple, and the requirement for polarization of the incident spectrum does not exist. Meanwhile, the back focal plane image only needs to be shot once, so that the operation is simple, and the time is saved.

A high-frequency heating device (1a) has a generating unit (8), a surface wave exciter (10), a first coupling unit (12), and a recycling unit (14). A generating unit (8) generates microwaves. The surface wave exciter (10) has a periodic structure, and heats the object to be heated (6) by propagating microwaves in a surface wave mode. The first coupling part (12) is arranged at one end part (15) of the surface wave excitation body (10). The microwave generated by the generating unit (8) is supplied to the surface wave exciter (10) via the first coupling unit (12). The reuse unit (14) recycles microwaves that have reached the other end (17) of the surface wave excitation body (10) in the microwave propagation direction from one end (15) of the surface wave excitation body (10). It is used for heating the object to be heated (6). According to this aspect, microwaves not absorbed by the object to be heated can be reused for heating the object to be heated.

The invention discloses an atmospheric ultrafine particulate matter moisture absorption growth detection device based on surface wave imaging. According to the device, a measurement cavity is arranged on a surface wave imaging substrate; an oil immersion microscopic objective, a microscopic imaging assembly, a polarization filter and an imaging detector are sequentially arranged below the surface wave imaging substrate; the oil immersion microscopic objective is arranged at the front end of the microscopic imaging assembly; a surface wave excitation assembly is arranged on the side face of the microscopic imaging assembly, and emergent light of the surface wave excitation assembly sequentially passes through the microscopic imaging assembly, the oil immersion microscopic objective and the surface wave imaging substrate to reach the measurement cavity, and then the light sequentially reaches the surface wave imaging substrate, the oil immersion microscopic objective, the microscopic imaging assembly and the polarization filter from the measurement cavity, and then reaches the imaging detector to form a detection light path. The device is high in imaging sensitivity, can realize real-time dynamic monitoring on a single superfine atmospheric particulate matter, can work in a real atmospheric environment, and is high in reliability, and the surface wave imaging substrate of the detection device can be repeatedly used.