Method for adjusting GaAs-based two-dimensional photonic crystal microcavity resonance mode

Abstract

The invention discloses a method for adjusting a GaAs-based two-dimensional photonic crystal microcavity resonance mode, which comprises the following steps: A. preparing a GaAs-based two-dimensional photonic crystal; B. putting the GaAs-based two-dimensional photonic crystal into hydrogen peroxide to be oxidized, and forming an oxide layer film with a certain thickness on the GaAs surface; C. corroding the oxide layer on the surface of the GaAs-based two-dimensional photonic crystal with hydrochloric acid solution with the mass concentration of 18 percent at normal temperature, and measuring the change of the photonic crystal microcavity mode with micro-PL spectrum; and D. repeating steps B and C until the photonic crystal microcavity mode is equal to quantum dot emission wavelength, producing resonance and stopping the corrosion. The method can achieve the purpose of accurately controlling the photonic crystal microcavity mode by precisely adjusting a photonic crystal hole, simultaneously can improve the smoothness of the side wall of the hole through chemical corrosion so as to improve the factor quality of the photonic crystal microcavity.

Description

technical field [0001] The invention relates to the technical field of GaAs-based two-dimensional photonic crystal production, in particular to a method for adjusting the resonance mode of a GaAs-based two-dimensional photonic crystal microcavity, which belongs to a part of GaAs-based two-dimensional photonic crystal microcavity production, and is mainly used to adjust photons Crystal microcavity resonance modes. Background technique [0002] The existence of the photonic band gap in photonic crystals prevents light of certain frequencies from passing through. Due to its high quality factor, small mode volume, and easy processing, two-dimensional photonic crystals can realize optoelectronic devices with excellent characteristics, such as photonic crystal quantum dot single photon sources, photonic crystal lasers, and photonic crystal large-angle Bending waveguides have become one of the research hotspots in recent years. [0003] The two-dimensional flat photonic crystal r...

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Problems solved by technology

[0005] During the production process, the diameter of the photonic crystal hole and the thickness of the plate will have a certain error from the theoretical value, which will eventually lead to a deviation between the photonic crystal microcavity mode and the theoretical value, so that the photonic crystal mode and quantum dots cannot be well integrated. produce coupled resonance

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