Fixed voice coil motor direct drive type X-Y micro-vibration platform

A technology of a micro-movement platform and a voice coil motor, which is applied to electromechanical devices, electrical components, etc., can solve the problems of increasing the motion inertia of the X-Y two-dimensional motor drive platform, affecting high speed, high precision and high stability, and achieves a simple structure. , Improve the dynamic characteristics, the effect of high precision

Inactive Publication Date: 2012-07-04
HUAZHONG UNIV OF SCI & TECH
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  • Abstract
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Problems solved by technology

On the other hand, in the common linked X-Y two-dimensional motor drive platform, one (dimension) motor is usually stationary, and the other (dimension) motor moves with the motion platf

Method used

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  • Fixed voice coil motor direct drive type X-Y micro-vibration platform
  • Fixed voice coil motor direct drive type X-Y micro-vibration platform
  • Fixed voice coil motor direct drive type X-Y micro-vibration platform

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[0017] The fixed voice coil motor direct drive X-Y micro-motion platform proposed in the present invention, such as figure 1 As shown, it mainly includes base 7, X-direction voice coil linear motor 13, Y-direction voice coil linear motor 3, X-direction motion platform 10, Y-direction motion platform 8, decoupling component 6, X-direction linear grating ruler tape 14, X-direction grating read head 15, Y-direction linear grating ruler tape 1, Y-direction grating read head 2, etc. Such as figure 2 As shown, the X-direction motion platform 10 is composed of an X-direction motion platform substrate 9 and two linear guide pairs 17, which are installed parallel to the X-axis; the Y-direction motion platform 8 is composed of a Y-direction motion platform substrate 18 and Two linear guide pairs 19, two linear guide pairs 19 are installed parallel to the Y axis; the decoupling component 6 is composed of a decoupling component base plate 20 and two linear guide pairs 21, two linear guide ...

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Abstract

The invention relates to a linear motor direct drive two-dimensional micro-vibration platform, in particular to a fixed voice coil motor direct drive type X-Y micro-vibration platform. The fixed voice coil motor direct drive type X-Y micro-vibration platform comprises a base, voice coil linear motors, an X-direction motion platform, a Y-direction motion platform, a decoupling component, a gratingruler and the like, wherein the voice coil linear motors directly drive the X-Y two-dimensional micro-vibration platform; both the X-direction and Y-direction voice coil linear motors are fixed on the base, and the X-direction and X-direction motions are realized by the decoupling component; and the grating ruler is used for detecting the position of the motors. In order to increase the motion speed and enhance the motion accuracy, the invention eliminates the traditional rotating motor transmission mechanism and adopts the linear motor to direct drive; in order to reduce the motion inertia, the invention designs the decoupling component, and both the X-direction and Y-direction linear motors are fixed to realize the X-Y two-dimensional motion; and in order to realize high-accuracy high-stability motion, the invention uses the grating ruler as the feedback element. The invention has the advantages of high speed, high acceleration, high accuracy and high stability, and can be used in the fields of high-speed automation equipments, electronic and semiconductor processing equipments, laser processing equipments and the like.

Description

technical field [0001] The invention relates to a fixed voice coil motor direct-drive X-Y micro-motion platform. The micro-motion platform has the characteristics of decoupling of moving parts, which makes its fast response, accurate positioning and high reliability performance more superior than the general linkage X-Y micro-motion platform, and can be applied to electronic and semiconductor processing equipment and laser processing equipment and its high-speed Automatic processing equipment and other fields. technical background [0002] In recent years, with the rapid development of advanced manufacturing technologies such as precision manufacturing technology, microelectronics technology and numerical control technology, the demand for high speed and high precision has become increasingly urgent, which has become the main trend of the current advanced manufacturing technology development. Taking the X-Y two-dimensional micro-motion platform as an example, most of the li...

Claims

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Application Information

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IPC IPC(8): H02K33/18
Inventor 艾武刘晓庆闫光亚何路
Owner HUAZHONG UNIV OF SCI & TECH
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