High-performance micro electromagnetic vibration energy harvester easy for integrated manufacturing

An electromagnetic vibration and energy harvester technology, applied in electrical components, electromechanical devices, etc., can solve the problems of weak magnetic field, difficult to integrate manufacturing, large size of devices, etc., and achieve the effect of high thickness and magnetic performance

Inactive Publication Date: 2010-12-22
ANHUI UNIVERSITY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, this design uses Deep Reactive Ion Etching (DRIE) to fabricate silicon cantilever beams, and the manufacturing cost is high. More importantly, the permanent magnets need to be manually bonded to the Pyrex glass. Ease of integrated manufacturing
In addition, the patent "Miniature Electromagnetic Energy Harvester and Preparation Method" (Application No. 200910080541.9) applied by Yuan Quan et al. in March 2009 uses the method of electroplating permanent magnets, wh

Method used

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  • High-performance micro electromagnetic vibration energy harvester easy for integrated manufacturing
  • High-performance micro electromagnetic vibration energy harvester easy for integrated manufacturing
  • High-performance micro electromagnetic vibration energy harvester easy for integrated manufacturing

Examples

Experimental program
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Effect test

Embodiment 1

[0029] Embodiment 1: A high-performance miniature electromagnetic vibration energy harvester that is easy to integrate and manufacture

[0030] see figure 1 (a), the high-performance miniature electromagnetic vibration energy harvester that the present embodiment is easy to integrated manufacturing comprises: substrate 1, insulating layer 2, coil 3, electrode 4, spring platform 5, supporting seat 6 and permanent magnet 7; 2 is directly connected to the substrate 1 and is located on the substrate 1. The coil 3 is also directly connected to the substrate 1 and is located on the substrate 1 and is wrapped by an insulating layer 2. The thickness of the insulating layer 2 is basically the same as that of the coil 3. 2 to 20 microns, the two ends of the electrode 4 are respectively connected to the two ends of the coil 3, used to lead out the electromotive force induced in the coil 3 to the external circuit, the electrode 4 is connected to the insulating layer 2, and is located on t...

Embodiment 2

[0033] Embodiment 2: A high-performance miniature electromagnetic vibration energy harvester that is easy to integrate and manufacture with three layers of coils.

[0034] see figure 2 , the miniature electromagnetic vibration energy harvester adopts a laminated structure of three-layer coil 3, and the three-layer structure does not interfere with each other, and is superimposed in the vertical direction, all wrapped in the insulating layer 2, the energy harvester The size of the energy harvester with a coil structure in Embodiment 1 is consistent with that of Embodiment 1, and except for the number of coil layers, the shape and size of other components are consistent with Embodiment 1.

Embodiment 3

[0035] Embodiment 3: A high-performance miniature electromagnetic vibration energy harvester that is easy to integrate and manufacture with an array of permanent magnets.

[0036] see image 3 , the permanent magnet 7 of the miniature electromagnetic vibration energy harvester is formed by an array of smaller structures, the array structure is in the form of 3×3, and the area of ​​each part is (10~120)×(120~300) square microns , the thickness is 10-800 microns, the row spacing is 10-30 microns, and the column spacing is 10-30 microns. The other features of the micro vibration energy harvester are similar to those in Embodiment 1.

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Abstract

The invention discloses a high-performance micro electromagnetic vibration energy harvester easy for integrated manufacturing, which comprises a substrate, an insulating layer, a coil, electrodes, spring platforms, support seats and a permanent magnet. The harvester is characterized in that the coil is attached to a surface of the substrate, the head and the tail of the coil are respectively connected with two electrodes, the upper surface of the substrate is covered by the insulating layer, the coil is cladded inside the insulating layer, and the two electrodes are arranged on the insulatinglayer; and a plurality of support seats are attached to the upper surface of the insulating layer and are provided with the spring platforms, the spring platforms are arranged right above the coil, gaps exist between the spring platforms and the coil, and the spring platforms are fixedly connected with the permanent magnet. The invention realizes high integrated manufacturing of the harvester; atthe same time, the permanent magnet obtained by duplication via a micro die has higher thickness and magnetic property compared with a galvanized or sputtering permanent magnet material, thus vibrational energy can be more effectively converted into electrical energy.

Description

technical field [0001] The invention relates to the field of vibration energy harvesters, in particular to a high-performance miniature electromagnetic vibration energy harvester that is easy to be integrated and manufactured. Background technique [0002] The continuous advancement of semiconductor manufacturing technology has led to the development of electronic devices and products in the direction of miniaturization. The emergence of Bluetooth technology and low-power communication standards (such as Zigbee and IEEE802.15.4) has largely promoted the development of miniature wireless sensor networks and communication nodes. Due to the characteristics of low energy consumption, small size, large function, and mass production, MEMS is also developing rapidly. However, compared with the ever-shrinking size of wireless sensing products and MEMS devices, power supply issues are becoming a big obstacle to their development. In addition, with the continuous development of new m...

Claims

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Application Information

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IPC IPC(8): H02K35/02
Inventor 王佩红刘慧婷杨卓青
Owner ANHUI UNIVERSITY
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