Circular platinum film two-dimensional wind speed and wind direction sensor
A wind speed, wind direction, and sensor technology, which is applied to instruments, piezoelectric devices/electrostrictive devices, and the use of thermal variables to measure fluid speed, etc., can solve the problems that the wind speed and wind direction cannot be directly and quantitatively expressed, and achieve a simple structure and reduce the size of the system. The effect of error and low sensitivity
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[0016] The circular platinum thin-film two-dimensional wind speed and direction sensor proposed by the present invention uses the principle that each point on the circular platinum thin film produces heat distribution changes due to different heat losses, thereby causing changes in resistivity to measure wind speed and wind direction. Its structural feature is that a circular platinum thin film 104 is used as the sensing surface. figure 1 A schematic diagram of the sensor structure is given. The lowermost layer of the sensor is a semiconductor silicon substrate 101, on which a heating resistor 102 (the bent pattern drawn by a dotted line in the figure) is made, and on the silicon substrate 101 with the heating resistor 102 is a silicon dioxide insulation Layer 103, on top of the silicon dioxide insulating layer 103 is a thin film of platinum. The platinum thin film main body 104 is circular in shape, and the circular area is the main sensing surface, and 16 test electrodes 10...
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