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Circular platinum film two-dimensional wind speed and wind direction sensor

A wind speed, wind direction, and sensor technology, which is applied to instruments, piezoelectric devices/electrostrictive devices, and the use of thermal variables to measure fluid speed, etc., can solve the problems that the wind speed and wind direction cannot be directly and quantitatively expressed, and achieve a simple structure and reduce the size of the system. The effect of error and low sensitivity

Inactive Publication Date: 2012-02-01
NANTONG DALISHEN CONSTR & MACHINERY JOINTVENTURE +1
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

It is impossible to directly and quantitatively express the wind speed and wind direction at each point on the sensing structure surface

Method used

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  • Circular platinum film two-dimensional wind speed and wind direction sensor
  • Circular platinum film two-dimensional wind speed and wind direction sensor
  • Circular platinum film two-dimensional wind speed and wind direction sensor

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Embodiment Construction

[0016] The circular platinum thin-film two-dimensional wind speed and direction sensor proposed by the present invention uses the principle that each point on the circular platinum thin film produces heat distribution changes due to different heat losses, thereby causing changes in resistivity to measure wind speed and wind direction. Its structural feature is that a circular platinum thin film 104 is used as the sensing surface. figure 1 A schematic diagram of the sensor structure is given. The lowermost layer of the sensor is a semiconductor silicon substrate 101, on which a heating resistor 102 (the bent pattern drawn by a dotted line in the figure) is made, and on the silicon substrate 101 with the heating resistor 102 is a silicon dioxide insulation Layer 103, on top of the silicon dioxide insulating layer 103 is a thin film of platinum. The platinum thin film main body 104 is circular in shape, and the circular area is the main sensing surface, and 16 test electrodes 10...

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Abstract

The invention discloses a circular platinum film two-dimensional wind speed and wind direction sensor. The lowermost layer of the sensor is a semiconductor silicon substrate (101), wherein a heating resistor (102) is made on the silicon substrate (101); a silicon dioxide insulating layer (103) is arranged above the silicon substrate (101) with the heating resistor (102); a circular platinum film (104) is taken as a sensing surface on the silicon dioxide insulating layer (103); and a platinum electrode (105) is positioned outside the circumference of the circular platinum film (104). Heat produced by the heating resistor forms the initial distribution of the specific resistance of the circular platinum film, flowing air moves the heat and causes the variation of the specific resistance distribution of the circular platinum film and the wind speed and the wind direction are measured by the principle that the heat distribution variation causes the specific resistance distribution variation of the platinum film.

Description

technical field [0001] The invention provides a two-dimensional wind speed and direction sensor structure, which uses the measurement principle of electrical impedance tomography (EIT) for sensing calculation, uses a circular platinum film as the sensing film, works based on the heat loss mode, and generates heat generated by the change of heat distribution. Variations in the resistivity distribution of circular platinum thin films were calculated for wind speed magnitude and wind direction. Background technique [0002] The wind speed and direction sensor is one of the important sensors and has a very wide range of uses. Most current wind speed and direction sensors use lumped parameter measurement methods, for example, methods that detect changes in thermistors or changes in plate capacitance. It is impossible to directly and quantitatively express the wind speed and wind direction at each point on the sensing structure surface. [0003] Platinum is the most commonly use...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01P5/12G01P13/02B81B3/00
Inventor 李伟华
Owner NANTONG DALISHEN CONSTR & MACHINERY JOINTVENTURE