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Chemical vapor deposition technology and vapor deposition furnace for preparing pyrolytic boron nitride (PBN) products

A technology for chemical vapor deposition and boron nitride products, which is applied in the field of chemical vapor deposition (CVD) to achieve the effects of improving production efficiency, improving qualification rate and uniform size

Inactive Publication Date: 2011-04-20
赵凤鸣
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At the same time, it will also appear when there are multiple small crucibles in one furnace, but the frequency of occurrence is not as high as that of large ones. This is a problem that occurs on one product.

Method used

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  • Chemical vapor deposition technology and vapor deposition furnace for preparing pyrolytic boron nitride (PBN) products
  • Chemical vapor deposition technology and vapor deposition furnace for preparing pyrolytic boron nitride (PBN) products
  • Chemical vapor deposition technology and vapor deposition furnace for preparing pyrolytic boron nitride (PBN) products

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0028] Single product with three concentric circles, multi-channel air intake, PBN crucible for in-situ synthesis (LEC method), diameter Φ300mm×245mm:

[0029] like figure 1 As shown, the motor 5.6 is connected with the turntable 5.1 through the bevel gear set 5.4, a mold is hung under the turntable 5.1, and the air inlet 2 is a multi-channel three concentric circle air inlet.

[0030] Preparation: Hang the processed graphite mold in the furnace, conduct electricity to raise the temperature, keep the temperature at 2000°C, and ventilate according to the molar ratio of the following gases: N ２ : NH ３ :BCl ３ =48:8:4.8, where N ２ 6 L / min, NH ３ 1 L / min, BCl ３ 0.6 L / min. The pressure in the furnace is 3 Torr, and the holding time is 24 hours. After power-on, the furnace is cooled to room temperature, and the white hard shell deposited on the mold is removed to form a complete PBN crucible blank, which is then machined into a qualified size to obtain a qualified PBN product. ...

Embodiment 2

[0037] 2 products, three concentric circles with multi-channel air intake, the preparation of PBN crucibles for VGF method, diameter Φ25mm×30mm, 2 pieces in one furnace.

[0038] like figure 2 As shown, the motor 5.6 is connected with the turntable 5.1 through the bevel gear set 5.4, and the two gears 5.2 are fixed under the turntable 5.1 through the connecting shaft, and a mold 4 is hung under each gear. Gear sleeve 5.5 rests on graphite sleeve 6.3 and meshes with all gears 5.2. Air inlet 2 is three concentric circular air inlets.

[0039] Preparation: Cover the furnace cover and start to heat up. After the temperature reaches 1900°C, turn on the motor 5.6 to make the gear 5.2 rotate in revolution and rotation under the action of the motor 5.6, and the revolution speed is 5 revolutions / minute. Raw material gas is introduced into the gas inlet 2 in the following molar ratio: N ２ : NH ３ :BCl ３ =12:1.2:1.0, the pressure in the furnace is 2 torr, the power is cut off after ...

Embodiment 3

[0042] 5 products with three concentric circles and multi-channel air intake, PBN crucibles for MBE method, diameter Φ22×120mm, 5 pieces in one furnace.

[0043] like image 3 As shown, the motor 5.6 is connected with the turntable 5.1 through the bevel gear set 5.4, and the five gears 5.2 are fixed on the turntable 5.1 through the connecting shaft, and a mold 4 is erected on each gear. The tooth sleeve 5.5 is placed on the graphite sleeve and meshes with all the gears 5.2. Air inlet 2 is three concentric circular air inlets.

[0044] Preparation: Cover the furnace cover and start to heat up. After the temperature reaches 1900°C, turn on the motor 5.6 to make the gear 5.2 rotate in revolution and rotation under the action of the motor 5.6, and the revolution speed is 3 revolutions / minute. Raw material gas is introduced into the gas inlet 2 in the following molar ratio: N ２ : NH ３ :BCl ３ =12:1.2:1.0, the pressure in the furnace is 2 torr, and the power is cut off after 14 ...

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Abstract

The invention aims to provide a chemical vapor deposition technology for preparing pyrolytic boron nitride products and equipment thereof. A vapor deposition furnace is adopted in the chemical vapor deposition technology and comprises a furnace body, a heating body, air inlets, an air outlet and dies, wherein the air inlets are arranged at the bottom or the top of the furnace body, a raw material gas is the mixed gas of N2, NH3 and BCl3, furnace temperature is 1800-2000 DEG C, and heat preservation lasts for 14-26 hours. The invention is characterized in that the air inlets of the vapor deposition furnace are three concentric air inlets, each gas is introduced from one concentric air inlet, 1-36 product dies carry out revolution and rotation simultaneity in the furnace, and the revolution speed of the dies in the furnace is 1-10 rounds per minute. A rotating mechanism of the product dies is arranged on the upper or lower end inside or outside the furnace body. The chemical vapor deposition technology can increase the quality and the production efficiency of PBN products and reduce production cost.

Description

technical field [0001] The invention relates to a production process of pyrolytic boron nitride (PBN) products, belonging to the technical field of chemical vapor deposition (CVD). [0002] Background technique [0003] Boron nitride has high thermal stability, and its products are indispensable tools in the preparation process of many new materials in the high-tech field. Pyrolytic boron nitride products made by vapor deposition method have thin wall, high density and high strength. High, material-saving and high yield, it has become an emerging method in the preparation of boron nitride products, especially the preparation of pyrolytic boron nitride crucibles. [0004] The preparation methods before the inventor's patent "Manufacturing Method of High-temperature Thermocouple Insulating Sleeve" (Patent No.: ZL 90110283.0) all used the concentric circle air intake method, and the product was hung without rotation. After this patent, including this patent, the method of pro...

Claims

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Application Information

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IPC IPC(8): C23C16/34C23C16/455C23C16/458
Inventor 赵凤鸣赵林
Owner 赵凤鸣
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