Silicon wafer-level frequency testing method

Abstract

The invention discloses a silicon wafer-level frequency testing method. Frequency testing is performed on a tester which is special for testing a memory type chip, namely a memory tester, by using a fail address memory resource of the tester. The method at least comprises the following steps of: selecting a scanning frequency to scan a waveform to be tested; selecting a reference voltage and converting an analogue signal obtained by scanning into a digital signal; storing the digital signal by using the fail address resource; and processing the stored data, calculating number of cycles in a fixed time and finally calculating the frequency. In the method, the memory type tester is directly utilized to test the frequency, so the testing function of the memory tester is expanded, the utilization rate is improved and the testing cot is reduced.

Description

technical field [0001] The invention relates to a silicon wafer level frequency testing method. Background technique [0002] In the existing testing in the semiconductor field, some testers are specially designed for memory testing. Since memory products do not need to perform frequency testing, these devices do not have frequency hardware modules, so frequency testing cannot be performed. If you want to use this type of machine for frequency testing, you need to modify the hardware of the machine and add a frequency testing module; or directly purchase a new type of tester that includes the frequency testing function. The above two points will cause a substantial increase in testing costs. [0003] However, many products now require frequency testing, so the existing memory testing machine cannot meet their testing requirements, so fewer and fewer chips can be tested on this platform, and the utilization rate of the tester is significantly reduced. If the hardware is tra...

AI Technical Summary

Problems solved by technology

The above two points will lead to a substantial increase in testing costs

[0003] However, many products now require frequency testing, so the existing memory testing machine cannot meet their testing needs, so fewer and fewer chips can be tested on this platform, and the utilization rate of the tester is significantly reduced

If the hardware is transformed, adding a frequency test module; or directly purchasing a new tester with a frequency test function will result in a substantial increase in test costs