Glass substrate carrying electrode
A technology for glass substrates and electrodes, applied in circuits, photovoltaic power generation, electrical components, etc., can solve problems such as difficulties, adhesion, and unsatisfactory problems, and achieve the effect of slowing migration and good deposition yield
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Embodiment 1
[0050] The same experiment as in the comparative example above was reproduced, except that a barrier coating according to the invention of a 130 nm thick zinc-tin mixed oxide layer was first deposited on the glass before the deposition of the electrodes. This layer is cathodically deposited from a zinc-tin alloy of 52% by weight zinc and 48% by weight tin to form Zn on the glass 2 SnO 4 layer.
[0051] After the heat treatment as in the comparative example, the measured resistance was 2.5 to 3.2 Ω / □ depending on the position of the electrode surface. This value varies with position because the electrodes are oxidized during heat treatment due to being unprotected from the oxidizing atmosphere. It was observed, however, that this maximum value was very significantly lower than that of the comparative example above. Thus, the presence of the barrier coating according to the invention clearly protects the electrode from migrating species from the glass during heat treatment, s...
Embodiment 2
[0053]A plate 1 of ordinary soda-lime glass 2.1 mm thick was introduced into a magnetron-type layer deposition apparatus. at a total pressure of 0.4Pa and at a ratio of 80% O 2 A zinc-tin mixed oxide layer 2 of 130 nm was deposited on the glass from a cathode of a zinc-tin alloy of 52% by weight zinc and 48% by weight tin in an atmosphere of an oxygen-argon mixture. A molybdenum electrode layer 3 with a total thickness of 500 nm was then deposited from a molybdenum target in an argon neutral atmosphere. The molybdenum electrode is subdivided into 5 layers, where the thicknesses are 40 / 190 / 40 / 190 / 40nm under the total pressure and power conditions respectively marked as A / C / A / C / A, these characters correspond to the following Conditions given in Table 1.
[0054] Table 1
[0055] condition
Power [W / cm 2 ]
Pressure [Pa]
A
0.63
0.66
B
1.56
0.4
C
2.08
0.4
D
1.15
0.4
[...
Embodiment 3 to 10
[0066] Example 1 was repeated varying some parameters. The deposition conditions and structures of the electrodes are given in Table 2 below.
[0067] In Examples 4, 6 and 7, the molybdenum electrode was subdivided into 5 layers, wherein the thickness and conditions of deposition are given in Table 2, where the letters A, B, C and D correspond to those given in Table 1 above. deposition conditions. In Example 7, the barrier coating is subdivided into three zinc-tin mixed oxide layers: the layer with a lower tin content is limited to two zinc stannate Zn 2 SnO 4 between layers. In the column "Structure" of Table 2, the symbol ZSO5 represents a zinc-tin mixed oxide obtained by cathode sputtering a metal target of a ZnSn alloy containing 52% by weight Zn and 48% by weight Sn in an oxidizing atmosphere, while The symbol ZSO9 designates a zinc-tin mixed oxide obtained by cathode sputtering in an oxidizing atmosphere from a metal target of a ZnSn alloy containing 90% by weight Z...
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