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Light-emitting diode chip and manufacturing method thereof and light-emitting diode with chip

A technology for light-emitting diodes and a manufacturing method, which is applied in the directions of semiconductor devices, electrical components, circuits, etc., can solve the problems of low light extraction efficiency of light-emitting diode chips and the like

Active Publication Date: 2011-05-11
BYD SEMICON CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The present invention mainly aims to solve the technical problem of low light extraction efficiency of light-emitting diode chips in the prior art, and provides a method for manufacturing a light-emitting diode chip, a light-emitting diode chip with high light extraction efficiency, and a light-emitting diode with the chip

Method used

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  • Light-emitting diode chip and manufacturing method thereof and light-emitting diode with chip
  • Light-emitting diode chip and manufacturing method thereof and light-emitting diode with chip
  • Light-emitting diode chip and manufacturing method thereof and light-emitting diode with chip

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no. 2 example

[0032] In this embodiment, the preferred substrate is sapphire; the semiconductor material is gallium nitride; the first type semiconductor is N-type gallium nitride; the second type semiconductor is P-type gallium nitride; the third electrode metal layer and the fourth electrode metal layer The materials are consistent, all of which are titanium, aluminum, titanium, gold multilayer metal film layer structure, and the thickness of each metal film layer is 5nm, 200nm, 15nm, 100nm in turn.

[0033]In step S100, the front side of the sapphire substrate is processed to form a rough surface by using an existing mechanical grinding process. The arithmetic average deviation of the profile of the rough surface is 0.2-2um, which is more conducive to reducing the probability of total reflection of light in the LED chip. And it is preferable that the convex microstructure formed by grinding is a cone structure. According to the principle of light reflection and refraction, the cone struc...

no. 3 example

[0042] In this embodiment, on the basis of the second embodiment, the light emitting diode chips manufactured in the second embodiment are continued to be processed, and a method for manufacturing a light emitting diode flip chip is proposed. refer to figure 2 In addition to steps S100 to S500, the method for manufacturing a light emitting diode chip in this embodiment also includes steps S600, S700, and S800, specifically as follows:

[0043] Step S600: Thinning the back of the sapphire substrate, the thinning in this embodiment is achieved by mechanical grinding. The thinned thickness depends on the thickness of the sapphire substrate, which can be easily determined by those skilled in the art. The back side of the thinned sapphire substrate also forms a rough surface, which is conducive to increasing light output.

[0044] Step S700: providing a substrate, the substrate has a third electrode and a fourth electrode corresponding to the third electrode metal layer and the ...

no. 4 example

[0051] image 3 It is a schematic diagram of the substrate structure of the fourth embodiment of the present invention. Figure 4 It is a schematic structural diagram of a light emitting diode chip according to the fourth embodiment of the present invention.

[0052] refer to image 3 , Figure 4 , the fourth embodiment of the present invention is proposed. The light-emitting diode chip of this embodiment includes a substrate 1, a first type semiconductor layer 2 formed on the front surface of the substrate, and a third electrode bonding area is formed on the first type semiconductor layer 2, formed on the first type semiconductor layer 2. The light emitting layer 3 on the layer 2, the second electrical type semiconductor layer 4 formed on the light emitting layer 3, the fourth electrode metal layer 7 formed on the second type semiconductor layer 4 and the third electrode bonding wire area The third electrode metal layer 8 on the substrate, wherein the front surface of the...

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Abstract

The invention provides a light-emitting diode (LED) chip, a manufacturing method for the LED chip and an LED with the chip. The manufacturing method for the LED chip comprises the following steps of: firstly, providing a substrate, and forming a rough surface of raised micro structure on the front of the substrate; secondly, performing polishing treatment so that the rough surface forms a single crystal surface; and finally, growing epitaxial layers in turn on the front of the polished substrate by using lateral epitaxial growth technology or transverse epitaxial technology and forming electrodes. The substrate of the LED chip has the raised micro structure of the single crystal surface, so the lattice defects of the epitaxial layers can be reduced, the internal quantum efficiency is improved, meanwhile, the probability of full reflection of light in the LED chip can be reduced, and the external quantum efficiency is improved; therefore, the LED chip has high light extraction efficiency.

Description

technical field [0001] The invention belongs to the technical field of semiconductor lighting, and in particular relates to a light-emitting diode chip, a manufacturing method thereof, and a light-emitting diode with the chip. Background technique [0002] A light-emitting diode (Light-Emitting diode, LED) chip is a semiconductor electroluminescent device that emits light through the combination of electrons and holes at the PN interface region. The earliest light-emitting diode chips have the disadvantages of low luminous efficiency and short life. The substrate of the light-emitting diode chip is a smooth plane, and an n-type layer, a light-emitting layer, and a p-type layer are grown on the substrate through epitaxy and chip manufacturing processes. Layer, n-type electrode layer and p-type electrode layer, the above-mentioned n-type layer, light-emitting layer and p-type layer grown on the substrate are almost all relatively smooth planes. The above-mentioned n-type laye...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L33/02
CPCH01L33/007H01L33/22
Inventor 苏喜林谢春林胡红坡张旺
Owner BYD SEMICON CO LTD