Baffle reaction-rectification equipment and anti-disproportionation reaction between dichlorosilane and silicon tetrachloride

Abstract

The invention relates to baffle reaction-rectification equipment and a process for comprehensive utilization of dichlorosilane and silicon tetrachloride. The baffle reaction-rectification equipment comprises a main baffle reaction-rectification tower, an overhead condenser, a bottom reboiler and a bottom material circulating pump. The main reaction-rectification tower is divided into four parts by means of a vertical baffle plate arranged therein: a public rectifying section, a public stripping section, a reaction and pre-separation section and an extraction section, wherein, the reaction andpre-separation section is defined into a B section, a C section, an E section and an F section; the extraction section is defined into a D section and a G section; reaction catalysts are filled in the C section and the E section for reaction and rectification; and other parts are provided with efficient structured packing or a tower plate for rectification and separation. In the invention, trichlorosilane with high application value is prepared by adopting the dichlorosilane and the silicon tetrachloride with lower value, thus improving the application rate of raw materials, and solving the enrichment problem of the dichlorosilane and the silicon tetrachloride. By utilizing the baffle reaction-rectification process, a plurality of towers used in reaction and rectification as well as separation and purification are integrated in one baffle reaction-rectification tower, thus saving equipment investment of the tower, and lowering energy consumption.

Description

technical field [0001] The invention relates to the technical field of reactive distillation and clapboard rectification, in particular to clapboard reactive rectification equipment and the antiproportionation reaction of dichlorodihydrosilane and silicon tetrachloride. Background technique [0002] At present, the polysilicon production process of most enterprises in my country is the improved Siemens method. This process uses trichlorosilane as the raw material for reduction, and some dichlorodihydrogen silicon and a large amount of silicon tetrachloride by-products are produced during the production process. For silicon tetrachloride, there have been methods such as cold hydrogenation to treat it and convert it into trichlorosilane for reuse. However, the domestic cold hydrogenation process is immature, and it has been difficult to master its core technology, with low efficiency and high energy consumption. And the amount of silicon tetrachloride to be treated is very lar...

AI Technical Summary

Problems solved by technology

For silicon tetrachloride, there have been methods such as cold hydrogenation to treat it and convert it into trichlorosilane for reuse. However, the domestic cold hydrogenation process is immature, and it has been difficult to master its core technology, with low efficiency and high energy consumption. And the amount of silicon tetrachloride to be treated is very large; for dichlorodihydrosilane, there is no mature technology to effectively use it at the present stage in China, even if the leaching process only for the purpose of tail gas treatment also has a large material consumption, and the two Chlorodihydrosilane has a low boiling point, is flammable and explosive, and is extremely explosive. It can explode in a wide range after being mixed with air, and it is extremely dangerous.

Images