The application discloses a multi-order
diffraction grating precision displacement sensor and a displacement measurement method, and relates to the field of displacement sensors.The multi-order
diffraction grating precision displacement sensor comprises a
laser, a half-wave plate, a first non-polarized light splitting
prism, a ±2-order
diffraction interference
grating precision displacement sensor module and a ±3-order diffraction interference grating precision displacement sensor module.The final displacement measurement result is obtained by weighting the
noise levels of the ±2-order diffraction interference grating precision displacement sensor module and the ±3-order diffraction interference grating precision displacement sensor module and then performing calculation.The application provides the multi-order
diffraction grating precision displacement sensor, uses the polarization characteristics of light to improve the application rate of effective light, reduces the interference of environmental
stray light on the measurement
signal, and improves the accuracy and stability of the overall
system.