Method for cleaning pipeline sprayed with silicon-containing bottom anti-reflection coating

Abstract

The invention discloses a method for cleaning a pipeline sprayed with a silicon-containing bottom anti-reflection coating (Si-BARC). The method comprises the step of cleaning the pipeline by using solution containing hydrofluoric acid and ammonium fluoride. The concentration of the ammonium fluoride in the solution is 35 to 38 percent, and the concentration of the hydrofluoric acid is 0.3 to 5 percent. The mass ratio of the hydrofluoric acid to the ammonium fluoride in the solution is 1:6-1:120. The cleaning method can thoroughly remove flocculent crystal formed by the Si-BARC, eliminate the defects of the Si-BARC and improve the yield of a device, cannot damage the production pipeline, and can avoid improving the production cost by reforming the Si-BARC after the Si-BARC flocculent crystal is formed.

Description

technical field [0001] The present invention relates to semiconductor manufacturing processes, and more particularly to methods for cleaning pipelines sprayed with silicon-containing bottom anti-reflective coatings. Background technique [0002] With the continuous development of integrated circuits, the minimum line width of transistors continues to shrink. First, the lines defined by the photolithography process are required to be narrower and narrower. Of course, the requirements for the etching process are also getting higher and higher. In order to meet the requirements of lithography, in addition to the continuous upgrading of lithography equipment, people also use other technologies to improve the quality and precision of lithography, and the use of anti-reflective coating (ARC) is one of them. The function of ARC is to prevent the reflection of light at the substrate interface after passing through the photoresist. This is because the reflected light returning to the...

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Problems solved by technology

However, this H 2 SO 4 with H 2 o 2 The mixed solvent of Si-BARC is relatively acidic, and the production pipelines of spraying Si-BARC are generally made of rubber materials, so H 2 SO 4 with H 2 o 2 The mixed solvent used to clean the production pipeline will corrode the production pipeline at the same time, so it is difficult to effectively remove the above-mentioned Si-BARC defects

[0008] Therefore, a new effective cleaning method is needed, which can completely remove the floc crystals formed by Si-BARC, eliminate Si-BARC defects, improve the yield of devices, and avoid damage to the production pipeline to avoid the formation of Si-BARC flocs. The Si-BARC layer needs to be re-formed after crystallization, resulting in an increase in production costs

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