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Tuning-fork vibrator and method for manufacturing the same and angular speed sensor

A manufacturing method and oscillator technology, applied in the direction of speed measurement, speed/acceleration/shock measurement, instruments, etc. by gyro effect, can solve the problems of reduced foot electrode area, reduced oscillator sensitivity, and reduced insulation reliability. Achieve the effect of improving the S/N ratio, improving the output efficiency, and increasing the electrode area

Inactive Publication Date: 2011-07-20
MURATA MFG CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] In the tuning fork oscillator, three electrodes are formed on a piezoelectric substrate for driving and detection. When connecting, the possibility of short circuit between electrodes due to conductive adhesive increases, and insulation reliability decreases
In addition, when the width of the divided part between these electrodes is wide, the electrode area of ​​the leg is reduced, the driving efficiency when driving the tuning fork oscillator and the output efficiency of the signal caused by the displacement of the leg are reduced, the oscillator sensitivity is reduced, and the S / N ratio worse

Method used

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  • Tuning-fork vibrator and method for manufacturing the same and angular speed sensor
  • Tuning-fork vibrator and method for manufacturing the same and angular speed sensor
  • Tuning-fork vibrator and method for manufacturing the same and angular speed sensor

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Embodiment Construction

[0032] figure 1 It is an internal transparent perspective view showing an example of an angular velocity sensor using the tuning fork oscillator of the present invention, figure 2 is its exploded perspective view. The angular velocity sensor 10 includes a circuit board 20 . The circuit board 20 is formed in a shape such as a rectangular plate shape, for example. A concave portion 22 is formed on one surface of the circuit board 20 . The concave portion 22 is formed, for example, at a position close to one corner of the circuit board 20 . in addition, figure 2 Here, the concave portion 22 is formed in a hook shape, but any shape can be used as long as an IC described later can be mounted, for example, a square shape or the like may be used.

[0033] In the concave portion 22 of the circuit board 20 , a plurality of electrodes 24 are formed side by side in a quadrangular shape, for example. Further, outside the recess 22 of the circuit board 20 , three rectangular elect...

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Abstract

Provided are a piezoelectric vibrator and a high efficient method manufacturing the same. The piezoelectric vibrator (70, 72) includes a tuning-fork vibrator (78) having a base (74) and legs (76a, 76b). The piezoelectric vibrator (70, 72) is formed as a laminate of two piezoelectric substrates (80, 82), an intermediate electrode (84), surface electrodes (86, 88, 90), and a whole surface electrode (94). The surface electrodes (86, 88, 90) are divided by division portions (92a, 92b) extending from the base (74) to the legs (76a, 76b). The division portions (92a, 92b) are formed wider at portions joining to a circuit board than at the other portions. The division portions (92a, 92b) are formed by dividing an electrode formed on the whole surface of a piezoelectric plate constituting the vibrator (78) by means of a dicer, or by dividing the electrode by means of laser irradiation or etching. The tuning-fork vibrator exhibits good insulation reliability at the time of mounting on a circuit board, and has a high vibrator sensitivity and a high S / N ratio.

Description

technical field [0001] The present invention relates to a tuning fork oscillator, a manufacturing method thereof, and an angular velocity sensor, and more particularly, to a tuning fork oscillator, a manufacturing method thereof, and an angular velocity sensor using the tuning fork oscillator, which are used in angular velocity sensors and the like for detecting angular velocity. Background technique [0002] Figure 11 It is a perspective view showing an example of a conventional tuning fork oscillator. The tuning fork oscillator 1 includes a vibrating body composed of a quadrangular base portion 2a and two leg portions 2b and 2c extending in parallel from one end of the base portion 2a. This vibrating body includes two tuning-fork-type piezoelectric substrates 3a, 3b. An intermediate metal film 4 is formed between these piezoelectric substrates 3a, 3b. In addition, three electrodes 5a, 5b, and 5c are formed on the surface of one piezoelectric substrate 3a. These electro...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01C19/56G01P9/04H03H9/02H03H9/19H03H9/215G01C19/5607G01C19/5628H01L41/22H01L41/29H01L41/311
CPCG01C19/5628H03H9/0547H03H9/0542H03H9/21G01C19/5607Y10T29/42
Inventor 小栗慎也多保田纯小池雅人清原友彦
Owner MURATA MFG CO LTD
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