Method for increasing vibration measurement precision of semiconductor laser sinusoidal phase modulating interferometer
A phase modulation and vibration measurement technology, applied in measurement devices, ultrasonic/sonic/infrasonic waves, instruments, etc., can solve problems such as difficult implementation, complex structure, and high requirements for phase synchronization, reducing random errors and eliminating system error, the effect of improving the accuracy of vibration measurement
Active Publication Date: 2014-04-09
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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[0004] Prior art [1] (X.F.Wang, X.Z.Wang, F. Qian, G.Chen, G.Chen, Z.Fang, "Photothermal modulation of laser diode wavelength: application to sinusoidalphase-modulating interferometer for displacement measurements," Optics & LaserTechnology, 31(8), 559-564, 1999.) uses the photothermal modulation effect of LD to eliminate the light intensity modulation effect, but this technology uses two LDs at the same time, which makes the structure of the interferometer more complicated, and cannot completely eliminate the LD light The effect of strong modulation can only reduce the effect of LD light intensity modulation by about 1 order of magnitude
[0005] Prior art [2] (Xuefeng Wang, Xiangzhao Wang, Yingming Liu, Caini Zhang, Danyang Yu, A sinusoidal phase-modulating fiber-optic interferometer insensitive to the intensity change of the light source", Optics & Laser Technology.2003, 35( 3), 219-222.) At the same time, the interference signal and the light source intensity change signal are collected for processing, but this technology uses two photodiodes, the structure is relatively complicated, and the phase synchronization of the two collected signals is highly required. Not easy to achieve
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[0036] The present invention will be further described below in conjunction with the embodiments and accompanying drawings, but the protection scope of the present invention should not be limited thereby.
[0037] see first figure 1 , figure 1It is a structural schematic diagram of a semiconductor laser sinusoidal phase modulation interferometer of the present invention. As can be seen from the figure, the semiconductor laser sinusoidal phase modulation interferometer used in the present invention consists of: a light source 2 with a light source controller 1, an isolator 3, a fiber coupler 4, a collimator 5, a photodetector 6, Data acquisition card 7, computer 8, piezoelectric ceramics 9 and signal generator 10, under the control of described computer 8, described signal generator 10 is the input control signal of light source controller 1, and light source controller 1 is light source 2 Provide driving current, the laser beam emitted by the light source 2 enters the isolat...
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A method for increasing vibration measurement precision of a semiconductor laser sinusoidal phase modulating interferometer is provided. Through choosing sinusoidal phase modulating depth reasonably, system errors caused by light intensity modulation of light source are eliminated in principle, random errors caused by direct current noises in circuits are reduced, and vibration measurement precision is raised.
Description
technical field [0001] The invention relates to a sinusoidal phase modulation interferometer, in particular to a method for improving the vibration measurement accuracy of a semiconductor laser sinusoidal phase modulation interferometer. Background technique [0002] As an internationally advanced quasi-heterodyne interferometry technology, the semiconductor laser sinusoidal phase modulation interferometer has the advantages of high measurement accuracy, convenient modulation, and simple structure, and has been widely used in the field of vibration measurement. [0003] The semiconductor laser sinusoidal phase modulation interferometer realizes the wavelength modulation by changing the injection current of the semiconductor laser (referred to as LD). While the wavelength is modulated by injecting current, the output light intensity of the LD is also modulated, and the frequency of light intensity modulation and phase modulation is the same. Since the acquisition of the meas...
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IPC IPC(8): G01H9/00
Inventor 李中梁王向朝王渤帆
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI