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Film thickness monitoring method capable of increasing spectral characteristics of film

A spectrum and performance technology, applied in metal material coating process, vacuum evaporation plating, coating, etc., can solve the problems of insensitivity to change, error, unstable optical properties of evaporation materials, etc.

Active Publication Date: 2011-09-21
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the quartz crystal oscillation method cannot directly reflect the optical thickness of the film. In the case of the same film quality and thickness, due to the instability of some parameters such as the coating environment, the optical properties of the evaporation material will also have certain differences. Stable, this will inevitably bring relatively large errors in the monitoring process
The photoelectrode value method takes the extreme point of film transmittance (or reflectance) as the stop point, but near the extreme point, the change of film transmittance (or reflectance) is close to zero, that is, the transmittance at this time (or reflectivity) is not sensitive to changes in thickness, which limits the monitoring accuracy of the photoelectrode value method, which is an inherent defect in the principle of the method
The photoelectrode value method requires the optical monitoring system to have a high signal-to-noise ratio, otherwise it is easy to misjudgment the extreme point; in addition, for different film systems, the optical monitoring signal changes with the change of film thickness. The monitoring of some film systems needs to replace the monitoring sheet during the monitoring process. However, because the thickness of the first layer of film plated on the new monitoring sheet is often too thick, this will cause thickness errors.
With the improvement of thin film spectral performance requirements, the photoelectrode value method can no longer meet the requirements of high-precision film thickness monitoring

Method used

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  • Film thickness monitoring method capable of increasing spectral characteristics of film
  • Film thickness monitoring method capable of increasing spectral characteristics of film
  • Film thickness monitoring method capable of increasing spectral characteristics of film

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Embodiment Construction

[0066] The present invention will be further described in conjunction with embodiment and accompanying drawing below.

[0067] see first figure 2 , figure 2 It is a schematic structural diagram of the coating device of the film thickness monitoring method for improving optical performance of the present invention. As can be seen from the figure, the coating device used in the present invention includes an optical film thickness monitoring system composed of light source emission system 18, monitoring sheet system 14, signal receiving system 19 and lock-in amplifier 12, and a computer 30 with control program , The baffle switch control circuit 20. Lock-in amplifier 12, monitoring piece rotating device 38, monochromator 7 are connected with the first serial port 29, the 3rd serial port 39, the 4th serial port 37 of the computer 30 with control program through the RS232 serial port of carrying, computer parallel port 31 The 2nd pin and the 3rd pin are connected to the first ...

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Abstract

The invention relates to a film thickness monitoring method capable of increasing spectral characteristics of film, for a computer-controlled coating device. The method comprises the following steps: (1) inputting coating parameters to a computer before coating; (2) selecting the monitoring wavelengths and monitoring glass number satisfying the limited conditions through the calculation of the computer to obtain a coating monitoring table of the coating system, wherein lambda Min<lambda<lambda Max and the coating monitoring table contains sequential films of the coating system, the corresponding monitoring wavelengths and monitoring glass serial numbers; and (3) coating and the like. By adopting the method, the monitoring wavelengths and required mininum monitoring glass number can be automatically selected; by adopting the proportional film thickness monitoring method, the film thickness monitoring error can be reduced, the film thickness monitoring precision can be increased and the normalized coating system and the non-normalized coating system can be monitored. Under the condition that the control precision of the film thickness monitoring system is not changed, the spectral characteristics of the film can be effectively increased.

Description

technical field [0001] The invention is related to film coating, and relates to a film thickness monitoring method, in particular to a film thickness monitoring method for improving film spectrum performance for a computer-controlled coating device to perform film coating. Background technique [0002] The thickness of the film decisively affects the optical properties of the film. Achieving precise control of film thickness is a key factor in the preparation of high-performance optical films. [0003] The methods of film thickness control usually include optical monitoring method and quartz crystal oscillation method. The optical monitoring method directly monitors the optical thickness of the film layer, which uses the principle that the transmittance (or reflectance) of the film changes with the change of the film thickness to realize the monitoring of the film thickness; the more commonly used in the optical monitoring method is the photoelectrode In the photoelectrode...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/54C23C14/24
Inventor 朱美萍易葵邵建达范正修
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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