Film thickness monitoring method capable of increasing spectral characteristics of film
A spectrum and performance technology, applied in metal material coating process, vacuum evaporation plating, coating, etc., can solve the problems of insensitivity to change, error, unstable optical properties of evaporation materials, etc.
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[0066] The present invention will be further described in conjunction with embodiment and accompanying drawing below.
[0067] see first figure 2 , figure 2 It is a schematic structural diagram of the coating device of the film thickness monitoring method for improving optical performance of the present invention. As can be seen from the figure, the coating device used in the present invention includes an optical film thickness monitoring system composed of light source emission system 18, monitoring sheet system 14, signal receiving system 19 and lock-in amplifier 12, and a computer 30 with control program , The baffle switch control circuit 20. Lock-in amplifier 12, monitoring piece rotating device 38, monochromator 7 are connected with the first serial port 29, the 3rd serial port 39, the 4th serial port 37 of the computer 30 with control program through the RS232 serial port of carrying, computer parallel port 31 The 2nd pin and the 3rd pin are connected to the first ...
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