Device and process for growing TiAlN film on surface of aluminum alloy in situ

An aluminum alloy surface and in-situ growth technology, which is applied in metal material coating process, ion implantation plating, coating, etc., to achieve high bonding strength, improved surface stress distribution, and high microhardness

Inactive Publication Date: 2011-11-16
CHINA JILIANG UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Thereby realizing the surface modification of aluminum alloy

Method used

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  • Device and process for growing TiAlN film on surface of aluminum alloy in situ
  • Device and process for growing TiAlN film on surface of aluminum alloy in situ

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Embodiment Construction

[0019] Further explain below in conjunction with accompanying drawing:

[0020] Such as figure 1 As shown, a device for in-situ growth of TiAlN film on the surface of aluminum alloy, the device can reach 1×10 -3 ~5×10 -4 On the vacuum chamber which can be filled with gas medium, ion implantation source 1, magnetron sputtering target 2, vacuum system 3, gas supply system 4, ion implantation control power supply 5, magnetron sputtering control power supply 6, rotating The workpiece support 7 and some auxiliary observation windows and thermometers, the magnetron sputtering target 2 are connected to the magnetron sputtering control power supply 6, the ion implantation source 1 is connected to the ion implantation control power supply 5, the vacuum system 3 and the gas supply system 4 are respectively Connected with the vacuum chamber of the device, the ion implantation source 1, the magnetron sputtering target 2, and the rotating workpiece support 7 are all fixed in the vacuum c...

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Abstract

The invention relates to a device and a process for growing a TiAlN film on the surface of an aluminum alloy in situ. In the device, an ion injection source 1, a magnetron sputtering target 2, a vacuum system 3, a gas supply system 4, an ion injection control power supply 5, a magnetron sputtering control power supply 6, a rotating workpiece bracket 7 and a plurality of auxiliary observation windows and temperature measuring instruments are arranged on a vacuum chamber of which the vacuum degree is 1*10<-3> to 5*10<-4>Pa and in which a gas medium can be filled, wherein the aluminum alloy is taken as a substrate, titanium is taken as the sputtering target, nitrogen is taken as injected gas, an ion sputtering technology and an ion injection technology are compounded, argon is introduced into an ion sputtering cavity, pure titanium is sputtered by argon ions and deposited on the aluminum alloy, and N ions are injected simultaneously; by utilizing the characteristics of uniform ion sputtering, fine particles, high ion injection binding force and no deformation, the titanium is subjected to ion sputtering on the surface of the aluminum alloy, the N ions are injected simultaneously and are injected ions and a reaction element, and ion sputtering and ion injection are performed according to certain process parameters; a high-hardness TiAlN film is grown on the surface of the aluminum alloy in situ, and the aim of modifying the surface of the aluminum alloy is fulfilled; and the invention has the characteristic of good surface condition, and is precise and controllable.

Description

technical field [0001] The invention relates to an in-situ growth TiAlN film device and process on the surface of an aluminum alloy and belongs to the technical field of plasma surface modification of metal materials and ion bombardment chemical heat treatment. Background technique [0002] There are many existing metal material surface modification methods, such as magnetron sputtering, ion sputtering, etc., but each technology has its shortcomings, such as magnetron sputtering has poor bonding force, slow ion injection speed, and direct radiation. sex etc. [0003] Aluminum and aluminum alloys have low density, high strength, excellent electrical and thermal conductivity, good plasticity and formability, no low-temperature brittleness, and easy processing. At present, aluminum and aluminum alloy materials have been widely used in construction, aviation, military, automobile, navigation, medical treatment and other fields. However, the wear resistance of aluminum is poor,...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/48C23C14/35C23C14/16
Inventor 张高会张泽栋李红卫李根郑顺奇乔宪武余森江周云
Owner CHINA JILIANG UNIV
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