Thermo-electric pile infrared detector

Abstract

The invention relates to a thermo-electric pile infrared detector, which comprises a substrate with a full-hollow structure, a thermo-electric pile, a first infrared absorption layer, a passivation layer, a reflective layer and a second infrared absorption layer formed by the release technology of a sacrifice layer, wherein the thermo-electric pile, the first infrared absorption layer and the passivation layer are formed on the substrate; and the reflective layer is formed on the passivation layer. By the detector, the infrared absorptivity is improved, and temperature difference of a thermoelectric couple at a cold end and a hot end is increased, so the response rate and sensitivity of the detector are improved.

Description

technical field [0001] The present invention generally relates to the field of infrared detectors, in particular to a thermopile infrared detector based on a micro-electromechanical system. Background technique [0002] At present, the use of infrared technology for infrared temperature measurement, infrared alarm, infrared detection, infrared tracking, etc., is widely used in various fields such as military, industry, medicine, agriculture and forestry, environmental protection, fire protection, search and rescue, etc. Among them, the thermopile infrared detector has many advantages and is widely used. The thermopile infrared detector is an uncooled infrared detector based on the Seebeck effect. With the development of Electro Mechanical systems), thermopile infrared detectors based on micromachines are also widely used. At present, for micromechanical thermopile types, the main types of thermocouples are: P-type polysilicon and gold thermocouples, Si epitaxial layer P-type...

AI Technical Summary

Problems solved by technology

Among them, the thermopile infrared detector has many advantages and is widely used. The thermopile infrared detector is an uncooled infrared detector based on the Seebeck effect. With the development of Electro Mechanical systems), thermopile infrared detectors based on micromachines are also widely used. At present, for micromechanical thermopile types, the main types of thermocouples are: P-type polysilicon and gold thermocouples, Si epitaxial layer P-type Diffusion area and aluminum thermocouple, N-type polysilicon and P-type polysilicon thermocouple, and use silicon oxide-silicon nitride composite dielectric layer as the infrared absorption layer. Compared with other detectors, this micromechanical thermopile infrared detector has high Sensitivity, relaxed working environment and very wide spectral response, and compatible with standard IC technology, low cost and suitable for mass production, but with the reduction of pixel size, the infrared absorption area also decreases, resulting in absorption efficiency decrease, and the response rate also decreases

Images