Method and system for simulating moth compound eye optical antireflection structure pattern

Abstract

The invention relates to a method and a system for generating a moth compound eye periodic antireflection structure pattern by a multi-beam laser interference technology. The system comprises a laser, a beam expanding collimation system, a beam splitting and refraction system, a half wavelength plate, a polarizer, a charged coupled device (CCD) and the like and is characterized in that: a laser interference system is used for combining six or more than six coherent laser beams, performing intensity modulation on light intensity distribution in an interference field and distributing by using the modulated and re-distributed light intensity to obtain the micro or nanoscale moth compound eye periodic structure pattern. By the method, the simulation of a moth compound eye periodic array structure is realized to the greatest extent; by adjusting an incident angle and a space angle of the interference system, the periodic and feature size of the structure pattern is adjusted from nanoscale level to micro level to make the manufacturing of the nanoscale and micro structures more convenient and accurately realize the simulation of the moth compound eye antireflection structure, so the light absorption efficiency is improved.

Description

technical field [0001] The invention relates to a method and system for simulating a periodic optical anti-reflection structure pattern of a moth's compound eye by using a multi-beam laser interference technology, which belongs to the improvement of the simulated optical anti-reflection structure pattern. technical background [0002] The moth-eye structure is an optical anti-reflection structure. In 1967, Bernhard discovered a nocturnal moth whose cornea hardly reflected infrared light, and the principle has been widely studied so far [1]. The compound eyes of moths are composed of many single eyes, and this structure makes them have very good anti-reflection efficiency. Inspired by the anti-reflection properties of the moth-eye structure, the researchers fabricated an array structure similar to the moth-eye structure and periodically distributed on the surface of the solar cell, which can achieve higher conversion efficiency of the solar cell [2, 3]. [0003] At present,...

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Problems solved by technology

Use this method to deposit SiNx thin films for the production of anti-reflection coatings on crystalline silicon substrates, but PECVD deposition is very expensive

In addition, commercial SiNx films are usually designed for anti-reflection at a wavelength of about 600nm, and the reflection loss increases rapidly in other wavelength ranges that contain part of the incident solar energy

In addition, for multilayer films, due to the limitation of coating materials, their chemical and physical properties are different from those of the base material, which will affect the adhesion effect, thermal matching and film stability.

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