Multi-stage dry vacuum pump touch screen control device

Abstract

The invention relates to a multi-stage dry vacuum pump touch screen control device, comprising: a liquid crystal screen drive module, a display screen, a power conversion module, a communication module, a touch screen drive module and a touch screen, wherein the liquid crystal screen drive module receives the touch screen through the touch screen drive module The input signal of the LCD screen driver module is sent to the display screen for display. The power conversion module provides the backlight voltage for the display screen. The LCD screen driver module communicates with the multi-stage dry vacuum pump through the communication module. The display unit of the present invention has a large screen size, beautiful colors, and can display Chinese characters, pictures, data, and characters at will, which solves the defect that the traditional character display screen can only display English; the resistive touch screen is used as the key input, and the image is used on the liquid crystal screen. Icons are used as button prompts, which are more intuitive, convenient, and more reliable than traditional membrane buttons; there are rich instructions integrated inside, and the serial port can be used for convenient control.

Description

technical field [0001] The invention relates to the field of vacuum environment acquisition of integrated circuit manufacturing equipment, in particular to a multi-stage dry vacuum pump touch screen control circuit. Background technique [0002] In recent years, with the vigorous development of the integrated circuit (IC) industry, the vacuum environment of IC equipment vacuum manufacturing equipment has been improved rapidly as an indispensable equipment in this industry. The field of equipment vacuum acquisition has been well applied. Since the IC industry has very strict requirements on the vacuum environment, different processes require different parameters such as different vacuum degrees, pumping speed curves, and different nitrogen cleaning flow rates. Properly adjust the control parameters of the pump according to the production process and application occasions to meet the needs of the site. The traditional vacuum pump has the defect of oil pollution, and the incon...

AI Technical Summary

Problems solved by technology

The traditional vacuum pump has the defect of oil pollution, and the inconvenience caused by the lack of man-machine interface is becoming more and more obvious. In addition, the IC production line requires long-term stable operation. A production line needs many vacuum pumps. There is a certain distance between the production line and the pump room, so it is difficult The remote intelligent control of vacuum pumps is particularly important

At present, the remote intelligent control technology of multi-stage dry vacuum pumps that can meet the above production needs has not been reported yet.

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