Evaporation or sublimation method and crucible device for evaporation material in vacuum evaporation device

Abstract

The invention provides an evaporation or sublimation method of evaporation material in a vacuum evaporation unit, and a crucible unit for vacuum evaporation. The units can work continuously for a long term and prevent the degradation of the evaporation material. In a crucible base (13), a radioactive heat source (21) radiating heat waves mainly including infrared ray is disposed in a heat wave transmission tube (22). The heat wave transmission tube (22) is made of material through which the infrared ray can transmit. The heat waves from the radioactive heat source (21) emit on the surface of the evaporation material M in a crucible body (12) and heat the evaporation material to make the surface of the evaporation material M for evaporation or sublimation. Even if the evaporated or sublimated evaporation material M is adhered on the surface of the heat wave transmission tube (22) or the inner surfaces of the crucible body (12) and the crucible base (13), the heat waves can be used to make the evaporated or sublimated evaporation material M for evaporation or sublimation again.

Description

technical field [0001] The present invention relates to a method for evaporating or sublimating an evaporation material in a vacuum evaporation device and a crucible device for vacuum evaporation, wherein an evaporation material including an organic evaporation material is heated for a long period of time without deterioration, and evaporated or sublimated , for vacuum evaporation. Background technique [0002] In the mass production process of substrates and the like to be subjected to vacuum evaporation, continuous operation is performed, and the evaporation material is heated for a long time, for example, about one week, to be evaporated and sublimated, and vacuum evaporation is performed on the substrates and the like. Such long-term continuous operation requires preventing the vapor deposition material from deteriorating due to prolonged heating. [0003] In the prior art, the following scheme is adopted for long-term continuous operation: [0004] A) A plurality of c...

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Problems solved by technology

[0008] However, the above scheme A) requires a crucible replacement device to be installed in the vapor deposition chamber in a vacuum state, resulting in an increase in the overall size of the vapor deposition device.

[0009] B) The scheme requires a supplementary device for evaporating materials, and taking into account the supplementary control, it will lead to complex installations

[0010] C) The solution requires equipment for forming the vapor deposition material into particles and a pressurizing device for pushing the granular vapor deposition material on the heating source, which will increase the cost of the equipment

[0011] In addition, in the proposal of Patent Document 1, if the evaporated and sublimated vapor deposition material comes into contact with a heating device heated to a high temperature, thermal decomposition will occur, which will degrade the quality of the vapor deposition material and have a bad influence on film formation.

[0012] In addition, in the prior art that heats the vapor deposition material with a laser beam to vaporize and sublimate, the vapor deposition material tends to adhere and accumulate on the inner surface of the crucible.

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