Oil-filled temperature and pressure combined sensor

A composite sensor, temperature and pressure technology, used in instruments, measuring devices, etc., can solve the problem of temperature and pressure composite sensors unable to measure signals, and achieve the effects of small size, high stability and reliability, and easy assembly.

Inactive Publication Date: 2012-01-18
NO 49 INST CHINESE ELECTRONICS SCI & TECH GRP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The purpose of the present invention is to solve the problem that the temperature and pressure composite sensor assembled by two kinds of sensors cannot measure the signal of local area at the same time, and to provide an oil-filled temperature and pressure composite sensor

Method used

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  • Oil-filled temperature and pressure combined sensor
  • Oil-filled temperature and pressure combined sensor

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Experimental program
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specific Embodiment approach 1

[0013] Specific implementation mode one: the following combination figure 1 Describe this embodiment, the oil-filled temperature and pressure composite sensor described in this embodiment, it is made up of tube base 1, pressure chip 2, temperature chip 3, gold wire lead wire 4-1, silver palladium wire 4-2, externally drawn wiring harness 5. Composed of ceramic ring 6, sealing plug 7, corrugated diaphragm 8 and pressure ring 9,

[0014] The tube base 1 is a rotating body, the center of the upper surface of the tube base 1 has a circular groove, and the bottom of the circular groove is provided with an oil injection hole and an outer lead hole, both of which are close to the groove wall of the circular groove , the bottom end of the oil injection hole is provided with a plug 7,

[0015] The pressure chip 2 and the temperature chip 3 are eutectically welded in the circular groove of the tube base 1, the distance between the adjacent surfaces of the pressure chip 2 and the temper...

specific Embodiment approach 2

[0023] Embodiment 2: This embodiment is a further description of Embodiment 1, and the range of d is 0.5mm-2mm.

[0024] The pressure chip 2 and the temperature chip 3 are designed with a reasonable distance, eutectic welding is welded into the tube base 1, the corrugated diaphragm 8 is welded to the upper end surface of the tube base 1 by argon arc welding, and the tube is filled with vacuum oil. Filling oil is injected into the seat 1, and the filling oil can be silicone oil. After the oil filling is completed, the oil injection hole is blocked, that is, the production of the oil-filled temperature and pressure composite sensor is completed.

specific Embodiment approach 3

[0025] Embodiment 3: This embodiment is a further description of Embodiment 1 or 2. The pressure chip 2 is composed of an SOI substrate, four single crystal silicon pressure sensitive resistors and SiO 2 Layer composition, four monocrystalline silicon pressure sensitive resistors and SOI substrate through SiO 2 layer isolation.

[0026] In this embodiment, the pressure chip 2 uses the SOI sheet as the substrate material, and uses the upper layer of single crystal silicon as the force-sensitive resistor material, and passes SiO2 between the resistor and the substrate. 2 Layer isolation removes the P-N isolation junction in the traditional diffused silicon piezoresistive sensor, so it has good high and low temperature stability, and is sealed with 7740 glass through electrostatic bonding to form a pressure sensitive chip.

[0027] The four monocrystalline silicon pressure-sensitive resistors are all standard Pt1000 resistors, and the external dimensions are 2×4.

[0028] The p...

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Abstract

The invention relates to an oil-filled temperature and pressure combined sensor, belonging to the technical field of temperature and pressure combined sensors. The oil-filled temperature and pressure combined sensor solves the problem that signals in a local area cannot be measured at the same time when a temperature and pressure combined sensor which is formed by two kinds of sensors in an assembling way. The oil-filled temperature and pressure combined sensor consists of a pipe seat, a pressure chip, a temperature chip, a gold wire lead, a silver-palladium wire, an external leading-out wireharness, a ceramic ring, a blocking plug, a corrugated diaphragm and a pressing ring. The pressure chip and the temperature chip are assembled in the pipe seat in a short distance and are welded on the pipe seat in a eutectic brazing way. When the oil-filled temperature and pressure combined sensor is used, after oil is filled in vacuum, the pressure chip and the temperature are protected at the same time and then pressure is sensed by the corrugated diaphragm. The oil-filled temperature and pressure combined sensor is suitable for the simultaneous measurement of the temperature and the pressure in the local area.

Description

technical field [0001] The invention relates to an oil-filled temperature and pressure composite sensor, which belongs to the technical field of temperature and pressure composite sensors. Background technique [0002] There are two main types of existing temperature and pressure composite sensors: one is to assemble different temperature sensors and pressure sensors together, and the two sensors combined in this way are usually far apart, at least in the order of cm, and cannot feel small at the same time. The temperature signal and pressure signal in the local area of ​​the sensor, and since the temperature sensor and the pressure sensor need to be separately packaged and isolated from the measured medium, the overall volume of the sensor is larger and the manufacturing cost is higher; the other is to combine the temperature sensor and the pressure sensor The pressure sensor is made on the same chip to achieve single-chip composite. Since the standard sensing film of the t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01D21/02
Inventor 田雷王永刚方建雷苗欣孙凤玲姜国光李海博尹延昭李玉玲张岩
Owner NO 49 INST CHINESE ELECTRONICS SCI & TECH GRP
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