Methane sensor based on single heating element, preparation method and application

Abstract

The invention discloses a methane sensor based on a single heating element, a preparation method and application. The methane sensor is suitable for industrial and mining enterprises and comprises a heating element, a measuring element, and an environment temperature measuring element, wherein a heater of the heating element of the methane sensor and a measuring component of the measuring element are suspended in air through supporting arms; the heating element independently heats to the high-temperature working state; the measuring element is independently used for detecting gas concentration; the temperature on a detecting sheet of the environment temperature measuring element detects is used for temperature compensation. The processing technology of the methane sensor is compatible with the CMOS (Complementary Metal Oxide Semiconductor) technology. The sensor has the advantages that the sensor is simple in structure, low in power dissipation, high in sensitivity, good in anti-jamming performance, and low in cost.

Description

technical field [0001] The invention relates to a methane sensor and its preparation method and application, in particular to a methane sensor based on a single heating element used in industrial and mineral networking, its preparation method and application. Background technique [0002] With the development of the Internet of Things, the current methane sensors cannot meet the needs of low-power, long-life, and low-cost methane sensors that detect low-concentration methane, such as individual equipment. [0003] At present, most of the sensors used to detect low-concentration methane underground in coal mines are catalytic combustion methane sensors based on traditional platinum wire heating. The principle is based on the heat release effect of the catalytic combustion reaction of methane gas. The catalytic combustion methane sensor consumes a lot of power. Due to the use of the catalyst, this kind of methane sensor has the disadvantages of carbon deposition, poisoning, ac...

AI Technical Summary

Problems solved by technology

The catalytic combustion methane sensor consumes a lot of power. Due to the use of catalysts, this kind of methane sensor has the disadvantages of carbon deposition, poisoning, activation, etc., and its performance is unstable and the calibration time is short.

In addition, the existing catalytic combustion methane sensors use platinum wire and other noble metal coils wound manually or mechanically as heating elements, which are difficult to mass-produce and have poor consisten

Images