Zinc oxide (ZnO) nanowire emitter growing on aligned carbon nanotube (ACNT) array template
A zinc oxide nanowire, carbon nanotube array technology, applied in the manufacture of discharge tubes/lamps, parts of discharge tubes/lamps, electrical components, etc., can solve problems such as poor size uniformity, poor stability, and short lifespan , to achieve the effect of stable operation, improved emission current density and stability, and uniform current emission
Inactive Publication Date: 2013-08-28
上海康众光电科技有限公司
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Problems solved by technology
[0008] However, the previous research mainly focused on growing zinc oxide nanostructures on randomly oriented carbon nanotube (or carbon nanofiber) films, and the randomness of the orientation of carbon-based films will lead to poor uniformity in the morphology and size of field emitters. As a result, the emission current is small, the stability is poor, and the life is short.
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[0023] Specific implementation plan
[0024] The embodiments of the present invention are described in detail below. This embodiment is implemented on the premise of the technical solution of the present invention, and detailed implementation manners and processes are given, but the protection scope of the present invention is not limited to the following embodiments.
[0025] In an embodiment, the preparation process of zinc oxide nanowires grown on the aligned carbon nanotube array template is as follows:
[0026] (1) First, select a heavily doped silicon wafer as the substrate, and clean the silicon wafer in acetone and IPA for two minutes to remove organics and other impurities on the surface, and bake to 180°C to keep Two minutes to remove moisture from the surface.
[0027] (2) Then spin-coat a layer of electron beam photoresist on the surface and harden the film for 90 seconds at a temperature of 180°C.
[0028] (3) The photoresist is photoetched into the required pattern, and a...
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Abstract
The invention discloses a zinc oxide (ZnO) nanowire emitter growing on an aligned carbon nanotube (ACNT) array template, which comprises a conductive substrate and an ACNT array template, wherein the ACNT array template grows on the conductive substrate, and a ZnO nanowire emitter grows on the surface of the ACNT array template; and the length of the ZnO nanowire emitter is 100 nm-2 mu m. The growing method of the ACNT array template can be a thermal chemical vapor deposition method, a plasma-enhanced chemical vapor deposition method, and the like. According to the invention, based on the composite structure of ZnO nanowires and carbon nanotube arrays, the current emitting of the composite structure array becomes more uniform, thereby increasing the density and stability of the emitted current.
Description
technical field [0001] The invention relates to a preparation method of a field emission element, in particular to a preparation method of a field emission cathode. Background technique [0002] The use of nano-zinc oxide materials in the field of field emission began at the beginning of this century, thanks to the continuous attempts of researchers to synthesize and apply new materials. Before zinc oxide was applied to field emission, many wide-bandgap semiconductor materials such as gallium nitride and aluminum nitride were tried for field emission, but they were not widely used due to various problems. Until a few years ago, some researchers turned their attention to zinc oxide materials with various structures, and a lot of research was devoted to the preparation methods and field emission properties of various zinc oxide structures, making zinc oxide another field after carbon nanotubes. The hotspot of launch material research. [0003] C. J. Lee et al. reported in 20...
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IPC IPC(8): H01J1/304H01J9/02
Inventor 张研李驰
Owner 上海康众光电科技有限公司