Uniaxial tension sample holder capable of testing in-situ stress and electrical property for transmission electron microscope

Abstract

A uniaxial tension sample holder capable of testing in-situ stress and electrical property for a transmission electron microscope belongs to the researching fields of transmission electron microscope fitting and nano-material in-situ measurement. A prior art can realize stress signal reading during material deformation, but has strict requirements on a sample and only suits for a none-dimensionalnano-material like a nano wire or a nanotube, or a sample prepared by focused ion beam cutting; besides the prior art can not realize electrical property measurement under a stress state. The sample holder comprises a self-design transmission electron microscope sample holder, a deformation microscope slide, a sample head and compressing tablets. The deformation microscope slide is fixed on the sample head through the compressing tablets; a circuit used for measuring cantilever beam minimal deformation and a circuit used for measuring sample electrical signals of the deformation microscope slide are connected to electrodes on two sides of the sample head and connected to external testing equipment through a lead in the sample holder, so as to realize real time monitoring on the stress and the electrical signals.

Description

Technical field: [0001] The invention relates to an in-situ force and electrical performance uniaxial stretching sample rod for a transmission electron microscope. The sample rod can realize the comprehensive test of in-situ force and electrical performance while realizing the deformation operation of the sample. The invention belongs to the research field of transmission electron microscope accessories and in-situ measurement of nanomaterials. Background technique: [0002] The deformation of materials is closely related to the microstructure. Since the invention of the transmission electron microscope, especially in the past two decades, the spatial resolution represented by the spherical aberration correction technology, the energy resolution represented by the monochromatic light source, and the high-speed Great progress has been made in fields such as time resolution represented by CCD cameras, and has made great contributions to scientific and technological progress in...

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Problems solved by technology

[0003] At present, the Gatan Company of the United States, the Hysitron Company of the United States and the Nanofactory Company of Sweden have made earlier attempts and researches in this area and have made corresponding progress, such as the 654 and 671 transmission electron microscopes produced by the Gatan Company of the United States. Although the sample rod can realize the loading of the sample force, and the form of the sample is not limited, but it is impossible to obtain the stress value of the sample during the deformation process, and at the same time, it is impossible to analyze the electrical properties of some under stress state. In-situ research of the sample is carried out to reveal the corresponding relationship between the change of the electrical properties of the material and the change of the microstructural structure; the PI 95 transmission electron microscope picometer indenter of the American Hysitron company can also realize the deformation operation of the material under in-situ compression, In-situ compressive deformation of various nanomaterials in the transmission electron microscope to study their plastic deformation behavior, although the reading of the stress signal during the material deformation process can be achieved, but the requirements for the sample are relatively strict, mainly used for research with Focus Ion Beam (Focus Ion Beam) , FIB), materials such as nano-columns, and if you want to study the material deformation mechanism of the material under a simple stress state (such as uniaxial tension), the requirements for the sample are more stringent, and you need to use FIB to prepare special The above-mentioned purpose can be achieved only by a high-quality tensile sample. However, the number of FIBs at home and abroad is limited and the cost is expensive, which is very unfavorable to the development of experimental work.

Similarly, the FM200E sample rod for transmission electron microscopy produced by the Swedish Nanofactory Company can measure mechanical signals in situ, but it can only be used for one-dimensional nanomaterials or samples made by focused ion beam cutting, and it cannot achieve sample strain. Measurement of the electrical properties of the state

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