Dimming delay line for silica delay and manufacturing method thereof
A manufacturing method and delay line technology, which are applied to optics, light guides, optical components, etc., can solve problems such as low adjustment efficiency, and achieve the effects of high adjustment efficiency, simple delay adjustment method and stable operation.
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[0034] from figure 1 It can be seen that the silicon-based delay adjustable optical delay line of the present invention includes: an input waveguide 1 and a straight-through end 3, and the input waveguide 1 and the straight-through end 3 are connected by a first curved waveguide 6; an upload end 2 and A download terminal 4, the upload terminal 2 and the download terminal 4 are connected by a second curved waveguide 7; an optical resonant cavity 5, the optical resonant cavity 5 is located at the input waveguide 1, the straight-through terminal 3, the upload terminal 2 and the download terminal 4, and form a coupling with the input waveguide 1, the straight-through end 3, the upload end 2 and the download end 4; two tuning electrodes 8, the two tuning electrodes 8 are respectively located at the coupling place of the first curved waveguide 6 and the optical resonant cavity 5 The two sides or the two tuning electrodes 8 are respectively located on both sides of the coupling point...
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