Technology of spraying electrodes while depositing film in manufacture of flexible film photovoltaic battery

Abstract

The invention discloses a technology of spraying electrode while depositing film in the manufacture of a flexible film photovoltaic battery, which relates to a technology of spraying electrode while depositing film in PEVCD (Plasma Enhanced Chemical Vapor Deposition) preparation, and comprises a vacuum device internally provided with a spraying electrode and a matrix electrode. The electrodes are connected with an outer radio frequency power supply; battery base materials are attached on the electrodes; the spraying electrode is internally provided with a gas channel, and the spraying electrode and the battery base materials attached on the spraying electrode are provided with small holes; the two groups of small holes are in one-to-one correspondence and are arranged according to a matrix or a concentric circle array; and gas is vertically sprayed to the battery base materials on the matrix electrode through the two groups of small holes, so that the battery base materials on the electrodes can be sprayed simultaneously when the sprayed gas is obtained, thus realizing film deposition. Therefore, the surfaces of the battery base materials on the electrodes are subjected to film deposition, and the film photovoltaic battery can be prepared. The productivity of a device can be multiplied, and the electrode cleaning workload can be greatly reduced.

Description

technical field [0001] The invention relates to the manufacturing technology of flexible thin-film photovoltaic cells, in particular to the technology of spraying electrodes and simultaneously depositing thin films in the PECVD preparation process. Background technique [0002] Before the present invention was proposed, PECVD (Plasma Enhanced Chemical Vapor Deposition) preparation was a very important process in the manufacturing process of flexible thin film photovoltaic cells. When the system applies a voltage between the electrodes, the electrons emitted by the cathode are accelerated in the electric field to gain energy. By colliding with the gas or molecules in the reaction chamber, they are separated, excited or ionized, forming many electrons, ions and active group. Particles with equal positive and negative total charges are a type of plasma. The particles that make up the plasma are deposited on the substrate through a series of physical-chemical reaction processe...

AI Technical Summary

Problems solved by technology

Although the gas is perpendicular to the electrode, spraying has the advantage of good uniformity for the preparation of photovoltaic cell thin films by PECVD, but the spray electrode can no longer be used for photovoltaic cell thin film deposition, the production capacity of the equipment is doubled, and the electrode cleaning operation is greatly increased.

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