Monolithic integration composite range vector hydrophone
A vector hydrophone, a single-chip integrated technology, is used in instruments, measuring devices, measuring ultrasonic/sonic/infrasonic waves, etc. It can solve the problems of narrow effective frequency band and cannot measure signals of various frequencies, etc. Band range, broaden the effective working frequency band, overcome the effect of inconsistency
Inactive Publication Date: 2012-04-25
ZHONGBEI UNIV
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Problems solved by technology
[0004] In order to solve the shortcomings of the existing vector hydrophone due to the mutual restriction of sensitivity and effective working frequency band, the effective frequency band range is narrow, so that it cannot meet the needs of measuring signals of various frequencies in the same test process, and provides a single-chip Integrated composite range vector hydrophone
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[0040] The present invention will be further described below in conjunction with accompanying drawing:
[0041] Such as Figures 1 to 3 Shown, a kind of monolithic integrated composite range vector hydrophone, comprises square-shaped bracket 1, elastic beam 2 and the mass blocks 3 in the middle of four small frame bodies that are respectively supported and suspended in square-shaped bracket 1 by elastic beam 2, each The four sides of each mass block 3 are respectively fixed to the square-shaped support 1 by an elastic beam 2, and the end and root of each elastic beam 2 are respectively integrated with a piezoresistor 4 with equal resistance, and two elastic beams located in the X direction The four varistors 4 on the beam 2 form a Wheatstone bridge, and the four varistors 4 on the two elastic beams 2 in the Y direction form a Wheatstone bridge; the four Wheatstone bridges in the X direction The four Wheatstone bridges in the Y direction are arranged in parallel; the middle pa...
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The invention discloses a monolithic integration composite range vector hydrophone. The current vector hydrophone can not measure various kinds of frequency signals in one test process because of mutual restriction of sensitivity and an effective work frequency band. By using the vector hydrophone of the invention, the above problem can be solved. The vector hydrophone comprises: a field-shaped support, elastic beams and mass blocks which are suspended on middle parts of four little box bodies of the field-shaped support respectively. Four sides of the each mass block are fixed with the field-shaped support through one elastic beam respectively. A terminal and a root of the each elastic beam are integrated with piezoresistors with a same resistance respectively. The middle parts of the four mass blocks are vertically provided with cilia cylinders with a same diameter respectively. The four cilia cylinders have different lengths. In the invention, through the four cilia cylinders with different lengths, sound signals in different measuring range scopes can be detected. The vector hydrophone can be used for determining a variable frequency value. And the effective work frequency band can be widened.
Description
technical field [0001] The invention relates to a MEMS vector hydrophone, in particular to a single-chip integrated composite range vector hydrophone. Background technique [0002] The vector hydrophone has the function of locating underwater sound sources and targets, and is an important equipment suitable for obstacle avoidance of various civilian ships, fishing, and ocean exploration. With the rise of the MEMS industry, vector hydrophones are gradually developing towards miniaturization and integration, and have broad military and civilian prospects. Because the relationship between the natural frequency and sensitivity of the existing vector hydrophone is mutually restricted, that is, the higher the height of the rigid cylinder, the higher the sensitivity of the vector hydrophone, but the lower its natural frequency, and vice versa Of course. Therefore, in order to take into account both its sensitivity and effective operating frequency band, the existing vector hydrop...
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Inventor 张文栋张国军熊继军薛晨阳刘林仙葛晓洋
Owner ZHONGBEI UNIV