One-chip triaxial micro mechanical accelerometer

Abstract

The invention discloses a one-chip triaxial micro mechanical accelerometer which comprises an upper cover, a lower cover and a plurality of sensitive mass block components with a movable capacitance polar plate, and the upper cover and the lower cover are connected into one body. The sensitive mass block components are arranged between the upper cover and the lower cover with a central symmetry structure. Both the upper cover and the lower cover are provided with a plurality of fixed capacitance plates. Fixed capacitance plates of the upper cover and fixed capacitance plates of the lower plates are in one-to-one correspondence and are arranged oppositely. The sensitive mass block components are provided between an upper fixed capacitance plate and a lower fixed capacitance plate to form aplurality of differential capacitors. The one-chip triaxial micro mechanical accelerometer has the advantages of good linearity and sensitivity in a small measuring range scope, simple processing technology, good repeatability, high sensitivity and low cost.

Description

technical field [0001] The invention relates to a micromechanical sensor in a microelectromechanical system, in particular to a single-chip three-axis micromechanical accelerometer. Background technique [0002] Accelerometers are mainly used to measure the motion parameters of moving objects relative to the inertial space. Traditional accelerometers are limited by volume, weight and cost, and it is difficult to popularize and apply them in the civilian field. Micro-mechanical accelerometers based on MEMS (micro-electromechanical systems) technology have outstanding advantages such as small size, light weight, low cost, and high reliability, and are widely used in automotive motion state control systems, camera stabilization systems, and sports machinery control. . [0003] At present, there are many literatures introducing accelerometers, which are mainly divided into piezoresistive, piezoelectric, capacitive, tunnel, etc., but usually only one or two axial accelerations c...

AI Technical Summary

Problems solved by technology

The three-axis micro-accelerometer with a single-mass structure is small in size, but there is a more obvious cross-axis coupling phenomenon, and the consistency of the three axes is poor

IMEGO introduced a three-axis micro-accelerometer based on a multi-sensitive mass block structure. The sensitive mass blocks are arranged symmetrically in the center and supported by a single cantilever beam, but there is a torsion phenomenon that affects the load to a certain extent. detection accuracy

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