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Method and apparatus for supplying hydrogen selenide mixed gas for solar cells

A solar cell and mixed gas technology, applied in binary selenium/tellurium compounds, electrical components, circuits, etc., can solve problems such as increased error, no longer effective flow control, and increased replacement frequency of gas storage cylinders, and achieves self-decomposition. The effect of suppressing, stabilizing supply, and reducing the concentration of hydrogen selenide

Inactive Publication Date: 2012-05-23
NIPPON SANSO CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, there is a problem that if a gas cylinder filled with a mixed gas adjusted to a predetermined concentration is used, the frequency of replacement of the gas cylinder will increase, and a sufficient gas supply cannot be ensured.
This phenomenon leads to the problem that the flow control becomes no longer effective
In this way, if the flow control is no longer effective, the mass flow controller (MFC) 112 for 100% hydrogen selenide gas judges that a smaller amount of gas flows than the actual and opens the control valve, thus resulting in a higher than the set value. more gas flows through
As a result, the following problems occur: from the start of supplying the hydrogen-selenide mixed gas, as time elapses, the concentration (set value) of the hydrogen-selenide mixed gas as the target and the concentration of the actually prepared hydrogen-selenide mixed gas ( The error between measured values) will increase (called drift phenomenon (reference Figure 4 ))

Method used

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  • Method and apparatus for supplying hydrogen selenide mixed gas for solar cells
  • Method and apparatus for supplying hydrogen selenide mixed gas for solar cells
  • Method and apparatus for supplying hydrogen selenide mixed gas for solar cells

Examples

Experimental program
Comparison scheme
Effect test

Embodiment

[0099] Specific examples are shown below.

[0100] (Experiment 1)

[0101] when using figure 1 When the shown supply device 1 supplies the hydrogen selenide mixed gas to the solar cell manufacturing device, the volume concentration of the hydrogen selenide in the hydrogen selenide mixed gas in the buffer container 2 can be kept at 20% for 100% hydrogen selenide The additional amount of gas and the corresponding additional amount of inert gas were verified.

[0102] In addition, as the conditions of the supply apparatus 1, the conditions of Table 1 were used. In addition, in figure 1 In the shown supply device 1 , an orifice with a diameter of 0.5 mm is provided at the inlets of the automatic valve 9 and the automatic valve 25 , and the basic gas flow rate when passing through the bypass path 7 is limited to 6.28 L / min.

[0103] In Experiment 1, unless otherwise specified, pressure means gauge pressure, flow rate means volumetric flow rate, and volume means volume under s...

example 1

[0122] use figure 1 The shown supply device 1 continuously supplies hydrogen-selenide mixed gas to a solar cell manufacturing device.

[0123] In addition, the conditions in Table 1 and the verification results of the above-mentioned Experiment 1 were used as the conditions when the supply device 1 supplies the hydrogen-selenide mixed gas.

[0124] Under the above-mentioned implementation conditions, when the hydrogen-selenide mixed gas is continuously supplied to the solar cell manufacturing apparatus, the gas concentration analyzer 22 connected to the buffer container 2 is used to record the concentration change of the mixed gas. figure 2 Show the result.

example 2

[0126] use image 3 The shown supply device 101 continuously supplies hydrogen-selenide mixed gas to a solar cell manufacturing device. When continuously supplying the hydrogen-selenide mixed gas to the solar cell manufacturing apparatus, a batch method using the buffer tank 102 was adopted, and the conditions in Table 1 were used as the conditions for supplying the hydrogen-selenide mixed gas from the supply device 101 .

[0127] Under the above implementation conditions, when the hydrogen-selenide mixed gas is continuously supplied to the solar cell manufacturing apparatus, the gas concentration analyzer 122 connected to the buffer container 102 is used to record the concentration change of the mixed gas. figure 2 Show the result.

[0128] Such as figure 2 As shown, in Example 2 as the prior art, relative to the set concentration of 20%, the measured concentration of the hydrogen-selenide mixed gas in the buffer vessel 102 varies between 19% and 41%. In contrast, in Exam...

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PUM

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Abstract

Disclosed is a method for supplying hydrogen selenide mixed gas for solar cells, wherein the method involves a process for supplying the hydrogen selenide mixed gas, which has been adjusted to a prescribed concentration by mixing an inactive gas supplied from a base gas supply channel (L1) and a 100% hydrogen selenide gas supplied from a source gas supply channel (L2). The aforementioned base gas supply channel (L1) and the aforementioned source gas supply channel (L2) are equipped with a bypass channel (L7) providing communication therebetween. The hydrogen selenide mixed gas with a prescribed concentration is adjusted by drawing the aforementioned inactive gas from the aforementioned source gas supply channel (L2) via the aforementioned bypass channel (L7) after a prescribed amount of the aforementioned 100% hydrogen selenide gas has been drawn from the aforementioned source gas supply channel (L2), and the volume concentration of hydrogen selenide remaining in the aforementioned source gas supply channel (L2) is reduced to no more than 10%.

Description

technical field [0001] The present invention relates to a method for supplying a hydrogen-selenide mixed gas for a solar cell and an improvement of a supply device. [0002] this application claims priority based on Japanese Patent Application No. 2009-237154 for which it applied to Japan on October 14, 2009, and uses the content here. Background technique [0003] In recent years, due to problems such as environmental pollution, global warming, and depletion of fossil fuels, solar cells have attracted attention as an energy alternative to petroleum. Copper indium gallium selenide (CIGS, Cu(InGa)Se) series thin-film solar cells, which are the current mainstream solar cells, for example, the compound solar cell of Patent Document 1 is known. [0004] Patent Document 1 discloses a chalcopyrite-type light-absorbing layer containing copper, indium, gallium, and selenium, and a method for producing the same. Specifically, the chalcopyrite-type light-absorbing layer thin film is...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B19/04H01L31/04
CPCH01L31/0322Y02E10/52C01B19/04Y02E10/541
Inventor 伊藤吉则高桥康弘
Owner NIPPON SANSO CORP