The invention provides a method for preparing a GIGS
solar cell by applying a one-step magnetron
sputtering method. According to the invention, soda-
lime glass is taken as a substrate, Mo / CIGS / CdS / i-ZnO:Al / Ni:Al target materials are sequentially adopted, and a CIGS
solar cell with the film thickness being about 1-2 microns through using
direct current sputtering and
radio frequency sputtering, wherein the Mo target adopts
direct current sputtering, the CIGS / CdS / i-ZnO / ZnO:Al sequentially adopt
radio frequency sputtering, and the Ni:Al adopts
direct current sputtering. Content control for each element is realized through adjusting various parameters in the sputtering process, and a CIGS
solar cell with the conversion efficiency reaching 5.77% at most can be obtained. The magnetron sputteringmethod provided by the invention is different from the traditional
quaternary co-
evaporation, sputtering and post-selenization method, so that there is no need of using a toxic
hydrogen selenide gasto prepare a CIGS
absorption layer by applying the post-selenization method, but the
absorption layer is directly prepared by adopting the
selenium-rich CIGS target material, thereby enabling the production process to be simpler to operate, green, environment-friendly and easy to control. In addition, the commercial production can be enabled to be equivalent to laboratory production in productionefficiency, and the method has wide commercial application prospects.