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Method for preparing GIGS solar cell by applying one-step sputtering method

A technology of copper indium gallium selenide and solar cells, which is applied in circuits, photovoltaic power generation, electrical components, etc., can solve the problems of high cost of selenization process, difficult control of Ga content and distribution, high technical difficulty of CIGS thin film solar cells, and achieve operational Simple and controllable steps, high conversion efficiency and strong stability

Inactive Publication Date: 2018-08-10
SOUTHWEST PETROLEUM UNIV
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Problems solved by technology

The process does not require high equipment, but the content and distribution of Ga in the selenization process is not easy to control
The technical difficulties are mainly concentrated in the selenization process, and the cost of the selenization process is high, which makes the CIGS thin-film solar cell technology difficult, and the atomic ratio of the multi-component components of the battery is not easy to control, and the repeatability problem limits its development. bottleneck

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  • Method for preparing GIGS solar cell by applying one-step sputtering method
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  • Method for preparing GIGS solar cell by applying one-step sputtering method

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Embodiment Construction

[0029] The present invention will be further described below in conjunction with the accompanying drawings.

[0030] 1. Preparation of CIGS absorber layer by one-step sputtering method

[0031] Firstly, the soda-lime glass was ultrasonically cleaned with toluene, acetone, and deionized water for 10 minutes in turn. The Mo back electrode was deposited on cleaned soda-lime glass by DC sputtering using a high-purity Mo target. The selenium-rich CIGS target was deposited with different radio frequency sputtering parameters to obtain the CIGS absorbing layer, and the crystal structure of the film in the range of 20° to 90° was detected by using a DX-2000 X-ray powder diffractometer. attached figure 1 It is the XRD pattern of chalcopyrite phase CIGS thin film. The peaks of 2θ values ​​at 26.9°, 44.6° and 52.9° correspond to Cu(In 0.7 Ga 0.3 ) Se 2 (112), (220) and (312) crystal planes of the chalcopyrite phase (JCPDS-#351102).

[0032] This result indicates that the CIGS film...

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Abstract

The invention provides a method for preparing a GIGS solar cell by applying a one-step magnetron sputtering method. According to the invention, soda-lime glass is taken as a substrate, Mo / CIGS / CdS / i-ZnO:Al / Ni:Al target materials are sequentially adopted, and a CIGS solar cell with the film thickness being about 1-2 microns through using direct current sputtering and radio frequency sputtering, wherein the Mo target adopts direct current sputtering, the CIGS / CdS / i-ZnO / ZnO:Al sequentially adopt radio frequency sputtering, and the Ni:Al adopts direct current sputtering. Content control for each element is realized through adjusting various parameters in the sputtering process, and a CIGS solar cell with the conversion efficiency reaching 5.77% at most can be obtained. The magnetron sputteringmethod provided by the invention is different from the traditional quaternary co-evaporation, sputtering and post-selenization method, so that there is no need of using a toxic hydrogen selenide gasto prepare a CIGS absorption layer by applying the post-selenization method, but the absorption layer is directly prepared by adopting the selenium-rich CIGS target material, thereby enabling the production process to be simpler to operate, green, environment-friendly and easy to control. In addition, the commercial production can be enabled to be equivalent to laboratory production in productionefficiency, and the method has wide commercial application prospects.

Description

technical field [0001] The present invention relates to a kind of for Cu(In 1-x Ga x ) Se 2 A one-step magnetron sputtering preparation method for solar cells belongs to the field of energy technology. Background technique [0002] With the rapid growth of the world's energy demand, traditional fossil energy is increasingly unable to meet our energy needs, especially in terms of clean, sufficient, efficient and safe energy solutions. Solar energy has become one of the most potential new energy sources due to its clean, pollution-free and "inexhaustible" advantages. At the same time, solar photovoltaic power generation technology has also entered a "golden period" of rapid development. [0003] A solar cell is a photoelectric device that directly converts solar energy into electrical energy. It has the advantages of strong light absorption capacity, long life cycle, and low maintenance cost. Since the first generation of monocrystalline silicon P-N junction solar cells w...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L31/18
CPCH01L31/0322Y02E10/541Y02P70/50
Inventor 李海敏王秦涛庄稼马柱淮明哲张骞
Owner SOUTHWEST PETROLEUM UNIV
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