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Solar battery manufacturing method

A technology of solar cells and manufacturing methods, applied in the direction of final product manufacturing, sustainable manufacturing/processing, circuits, etc., to achieve the effect of simple process

Active Publication Date: 2011-11-09
TAIWAN SEMICON MFG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

When a safer evaporation process that does not use hydrogen sulfide (H2S) is still not suitable for an economical mass-production manufacturing process, there is a need for a solar cell manufacturing method that meets the above needs and overcomes the shortcomings of the prior art

Method used

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Embodiment Construction

[0022] Hereinafter, each embodiment is described in detail and examples accompanied by accompanying drawings are used as a reference basis of the present invention. In the drawings or descriptions in the specification, the same reference numerals are used for similar or identical parts. And in the drawings, the shapes or thicknesses of the embodiments may be enlarged, and marked for simplicity or convenience. Furthermore, parts of each element in the drawings will be described separately, and it should be noted that elements not shown or described in the drawings are forms known to those skilled in the art.

[0023] In one embodiment of the invention, the invention relates to a method of fabricating a solar cell with a sulfurized chalcogenide semiconductor absorber. A sulfur-containing target can be sputtered on a bulk layer that is first sputtered on a substrate. In some embodiments, sputtering is performed sequentially—the bulk layer is formed by sputtering prior to sputte...

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Abstract

The invention provides a solar battery manufacturing method. Sulfur-containing chalcogenide absorbers in thin film solar cell are manufactured by sequential sputtering or co-sputtering targets, one of which contains a sulfur compound, onto a substrate and then annealing the substrate. The anneal is performed in a non-sulfur containing environment and avoids the use of hazardous hydrogen sulfide gas. A sulfurized chalcogenide is formed having a sulfur concentration gradient. The process operations are simplified and uses only one annealing operation, as opposed to two annealing operations in other processes. Further, the disclosed process avoids the use of selenium containing or sulfur containing gas environments, which are difficult to use in a mass-production environment. Particularly, hydrogen selenide and hydrogen sulfide, both of which are very toxic at low concentrations, are avoided.

Description

technical field [0001] The invention relates to a method for manufacturing a solar cell, in particular to a method for forming a chalcogen compound absorber of the solar cell. Background technique [0002] Solar energy, or the conversion of sunlight into electricity, can be competitive with other forms of energy generation if it is efficient, cheap and safe. Although thin-film solar cell manufacturing processes combine low manufacturing costs and high efficiencies, toxic and hazardous materials and processes are still required. [0003] Solar cells are generally operated by absorbing photons that excite electrons from the valence band to the conduction band. When connected to a circuit, electrons in the conduction band flow to drive a current. Thin film solar cells use absorber layers that exhibit a direct bandgap and allow cells to be only a few millimeters (mm) thick. In many thin film solar cells, photon or light absorption includes every Group I (copper, silver, gold)...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L31/18
CPCH01L31/0322C23C14/3464C23C14/0623Y02E10/541Y02E10/52Y02E10/50Y02P70/50H01L31/04H01L21/02631
Inventor 李文钦严文材陈鼎元余良胜张玉函
Owner TAIWAN SEMICON MFG CO LTD
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