Vacuum ultraviolet light ionization source used for high-flux gas sample analysis

Abstract

The invention relates to a mass spectrometry instrument, more particularly to a vacuum ultraviolet light ionization source used for a high-flux gas sample analysis. The ionization source comprises an ionization source cavity and vacuum ultraviolet sources. A gas inlet is arranged at the top of the ionization source cavity and a gas sample enters the ionization source cavity through the gas inlet. Ion extraction electrodes, ion funnels and difference interface polar plates are successively arranged inside the ionization source cavity along a flow direction of the gas sample, wherein the ion extraction electrodes are coaxial, separated from each other and parallel to each other. The vacuum ultraviolet sources are arranged at side walls of the ionization source cavity; and vacuum ultraviolet lights emitted by the vacuum ultraviolet sources pass through areas between the separated polar plates and enter through hole areas of the ion extraction polar plates, wherein the vacuum ultraviolet lights are parallel to polar plates of the ion extraction electrodes. According to the vacuum ultraviolet light ionization source provided in the invention, detection sensitivity of a whole mass spectrometer system can be effectively improved; and the vacuum ultraviolet light ionization source has wide prospects for application in organic pollutant trace quantity or ultra trace quantity detection in a high-flux gas sample analysis and environment.

Description

technical field [0001] The invention relates to a mass spectrometer analysis instrument, in particular to a vacuum ultraviolet photoionization source for high-throughput gas sample analysis. Background technique [0002] Vacuum ultraviolet light refers to deep ultraviolet light with a wavelength of less than 200nm, which can cause single photon ionization (Single Proton Ionization, SPI) of material molecules whose ionization energy is lower than its photon energy, and generate a large number of molecular ions with almost no fragment ions. Using vacuum ultraviolet light as the ion source of mass spectrometry, the spectra obtained are simple, and can be used for rapid qualitative and quantitative analysis based on the molecular weight information of the substance. It has been more and more widely used in the fields of process analysis and online monitoring of organic matter. Hou Keyong [Chinese invention patent: 200610011793.2] used vacuum ultraviolet lamp as the ion source of...

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Problems solved by technology

In this structure, on the one hand, the irradiation range of vacuum ultraviolet light is small, and at the same time, it is limited by the intensity of a single vacuum ultraviolet light source, resulting in low ionization efficiency of SPI; on the other hand, high-throughput gas sample injection will also Increase the collision between molecules and ions in the ionization source to make the ions diverge, and the DC electric field in the ionization source cannot converge the ions, thus reducing the transmission efficiency of ions

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