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Displacement data processing method based on microchip laser feedback interferometer

A microchip laser and data processing technology, which is applied in the direction of instruments, optical devices, measuring devices, etc., can solve the problems that the phase meter does not suppress noise, signal amplitude and signal-to-noise ratio are low, so as to increase the amplitude and improve The effect of high phase resolution and high processing speed

Inactive Publication Date: 2013-12-11
TSINGHUA UNIV
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  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, because the microchip laser feedback interferometer uses weak light feedback, its signal amplitude and signal-to-noise ratio are very low. The phase meter has high requirements on the quality of the detected signal itself and the phase meter itself does not have the function of suppressing noise, so Impossible to use a phase meter directly for high-resolution phase measurements

Method used

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  • Displacement data processing method based on microchip laser feedback interferometer
  • Displacement data processing method based on microchip laser feedback interferometer
  • Displacement data processing method based on microchip laser feedback interferometer

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Embodiment 1

[0016] Embodiment 1: The present invention uses the quasi-co-channel microchip laser feedback interferometer in the prior art as an embodiment to illustrate the method of processing the collected data on the displacement variation of the measured object.

[0017] Such as figure 1 As shown, the quasi-co-channel microchip laser feedback interferometer 1 in the prior art includes a microchip laser 11, a beam splitter 12, two acousto-optic frequency shifters 13, 14, a converging lens 15, and a reference mirror 16 , a photodetector 17 and a number of light baffles (not shown in the figure), the specific arrangement of the optical elements and the optical path propagation path are the same as those of the prior art and will not be repeated here. The present invention includes a heterodyne signal processing system 2, and the heterodyne signal processing system 2 includes a mixer 21, and the two input ends of the mixer 21 are respectively connected with a sinusoidal signal generator 2...

Embodiment 2

[0035] Embodiment 2: The present invention uses the common microchip laser feedback interferometer 1 in the prior art as an embodiment to illustrate the method of processing the collected data on the displacement variation of the measured object.

[0036] Such as figure 2 As shown, compared with the quasi-common-path microchip laser feedback interferometer, the conventional microchip laser feedback interferometer in the prior art only lacks a reference mirror 16, that is, it also includes a microchip laser 11, a beam splitter 12, and two acoustic mirrors. Optical frequency shifters 13, 14, a converging lens 15, a photodetector 17, and several light baffles (not shown in the figure), the setting of the specific optical elements and the propagation of the optical path are the same as those of the prior art and will not be repeated here. . Since there is no reference reflector 16 in the common microchip laser feedback interferometer 1, there is only one measurement light feedba...

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Abstract

The invention relates to a displacement data processing method based on a microchip laser feedback interferometer, which comprises the following steps of: including the microchip laser feedback interferometer, a mixer, a filter, an amplifier, a single-ended signal adapter, a phase meter, and a heterodyne signal processing system of a computer; inputting an optical signal obtained from the microchip laser feedback interferometer into the filter and the amplifier for filtering and amplifying to obtain a single-frequency optical signal; sequentially inputting electric signals used as stable standard signals and participated in heterodyne phase measurement into the filter and the amplifier for filtering and amplifying to obtain single-frequency and large-amplitude electric signals; respectively inputting the generated signals into the single-ended signal adapter, converting sine signals into square wave signals by the single-ended signal adapter and inputting the square wave signals into the phase meter, calculating an external cavity phase variable quantity by using the phase meter; and calculating the external cavity phase variable quantity demodulated by the phase meter through the computer to obtain a displacement variable quantity of an object to be measured. The invention can be widely applied to signal processing of a frequency shift light feedback system.

Description

technical field [0001] The invention relates to a displacement data processing method, in particular to a displacement data processing method based on a microchip laser feedback interferometer for non-contact precision displacement measurement of a non-cooperating target. Background technique [0002] The microchip laser has extremely high sensitivity to optical feedback. Combining the frequency-shifting optical feedback system with phase heterodyne measurement technology can achieve high-resolution motion displacement measurement. The heterodyne signal processing system is the last link of the heterodyne interferometry system based on phase detection, and it is also an important link that determines the accuracy of the system. However, in the actual frequency-shifting optical feedback system, the feedback optical signal is not a standard sinusoidal signal. From the signal power spectrum, there is a lot of noise around the signal peak. phase amplifier for processing, but it...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/02
Inventor 张书练张松任舟谈宜东
Owner TSINGHUA UNIV
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