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Tubular target bonding method

A bonding method and target material technology, applied in welding equipment, manufacturing tools, metal processing equipment, etc., can solve the problem of uneven thickness of bonding layer or welding layer, adverse effects of sputtering process, difficult target tube and liner For medium problems, the effect of improving welding quality, saving welding materials and improving performance can be achieved

Inactive Publication Date: 2012-06-27
JIYUAN YUGUANG NEW MATERIAL TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In addition, because the centering of the target tube and the liner is not easy to achieve, the thickness of the adhesive layer or weld layer is not uniform, especially along the direction of the tube target axis
These will have adverse effects on the sputtering process

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0027] Embodiment 1: as figure 1 , 2 , Shown in 3, a kind of bonding method of tubular target material, the steps of this method are as follows:

[0028] Step 1: First process the target tube blank whose inner diameter and thickness are larger than the final requirement, and whose length is shorter than the final requirement; select a metal liner whose inner diameter and outer diameter are exactly the same as the final requirement, but whose length is longer than the final requirement;

[0029] Step 2: Grinding, sandblasting, cleaning and coating the surface of the target tube blank and metal liner to be bonded;

[0030] Step 3: Evenly coat a layer of low-melting point solder on the outer surface of the treated metal liner, and the thickness of the low-melting point solder coating should not be less than the designed solder layer thickness;

[0031] Step 4: Set the metal liner coated with low melting point solder inside the target tube blank;

[0032] Step 5: After the meta...

Embodiment 2

[0039] Embodiment 2: as figure 1 , 2 , Shown in 3, a kind of bonding method of tubular target material, the steps of this method are as follows:

[0040] The first step: process the target tube blank whose inner diameter and thickness are larger than the final requirement, and whose length is smaller than the final requirement.

[0041] final requirements; select a metal liner whose inner diameter and outer diameter are exactly the same as the final requirements, but whose length is longer than the final requirements;

[0042] Step 2: Grinding, sandblasting, cleaning and coating the surface of the target tube blank and metal liner to be bonded;

[0043] Step 3: Evenly coat a layer of low-melting point solder on the outer surface of the treated metal liner, and the thickness of the low-melting point solder coating should not be less than the designed solder layer thickness;

[0044] Step 4: Set the metal liner coated with low melting point solder inside the target tube blank; ...

Embodiment 3

[0052] Embodiment 3: as figure 1 , 2 , Shown in 3, a kind of bonding method of tubular target material, the steps of this method are as follows:

[0053] The first step: process the target tube blank whose inner diameter and thickness are larger than the final requirement, and whose length is smaller than the final requirement.

[0054] final requirements; select a metal liner whose inner diameter and outer diameter are exactly the same as the final requirements, but whose length is longer than the final requirements;

[0055] Step 2: Grinding, sandblasting, cleaning and coating the surface of the target tube blank and metal liner to be bonded;

[0056] Step 3: Evenly coat a layer of low-melting point solder on the outer surface of the treated metal liner, and the thickness of the low-melting point solder coating should not be less than the designed solder layer thickness;

[0057] Step 4: Set the metal liner coated with low melting point solder inside the target tube blank...

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Abstract

The invention relates to a tubular target bonding method for bonding a tubular target and a metal lining tube. The method makes the whole tubular target with large length be bonded with the metal lining tube in high quality; and the high quality bonding is concretely embodied in cases that the weld thickness is controlled, the weld thickness can be reduced to a common weld thickness of a planar target, even thinner, and the uniformity of the weld thickness can be maintained. The method is beneficial to the welding flux saving and target use performance improvement. The method is suitable for the production of the tubular target with certain plasticity, and the plasticity of the tubular target satisfies requirements of a cold drawing technology.

Description

technical field [0001] The invention relates to a bonding method for a tubular target material used for bonding a tubular target material and a metal liner. Background technique [0002] According to different shapes, sputtering targets can be divided into two categories: planar targets and tubular targets (also called rotating targets or hollow cylindrical targets). The sputtering utilization rate of the former is about 30%, while the utilization rate of the latter can be as high as 80%. more and more. Known tubular targets include metals, such as Ag, Al, Ti tubular targets, and ceramics, such as AZO (zinc aluminum oxide), ITO (indium tin oxide), Si3N4 (silicon nitride) tubular targets. Some metal targets, especially metal or alloy targets with relatively low melting point and strength, are prone to creep during the sputtering process, which affects the sputtering process. These metal or alloy targets need to be bonded to another material with high strength and not easy ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B21C37/08B21C1/22B23K1/00
Inventor 张小国原和平王广欣曾玉林冯斐斐刘腾腾王东亮
Owner JIYUAN YUGUANG NEW MATERIAL TECH
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