Method and device for treating chlorosilane liquid produced in polysilicon production

A processing device and processing method technology, applied in the directions of silicon oxide, silicon dioxide, chlorine/hydrogen chloride, etc., can solve problems such as safety and environmental hazards, and achieve the effects of long service life and high filtration efficiency

Active Publication Date: 2012-06-27
FEATURE-TEC (WUXI) FILTRATION TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Some untreated chlorosilanes are highly corrosive, toxic and harmful liquids or gases, which are very harmful to safety and the environment

Method used

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  • Method and device for treating chlorosilane liquid produced in polysilicon production
  • Method and device for treating chlorosilane liquid produced in polysilicon production
  • Method and device for treating chlorosilane liquid produced in polysilicon production

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Embodiment Construction

[0023] The specific embodiments of the present invention will be further described below in conjunction with the accompanying drawings.

[0024] figure 2 Among them, including bottom slag discharge valve 1, residual liquid return valve 2, liquid inlet valve 3, pipe filter 4, filter element 5, liquid collection pipe 6, overflow valve 7, air supply valve 8, water supply valve 9, the second One backwash valve 10, exhaust valve 11, differential pressure transmitter 12, second backwash valve 13, liquid outlet valve 14, safety gas replacement valve 15, hydrogen chloride gas outlet valve 16, slag discharge tank 17, silicon dioxide Drain valve 18, auxiliary heating system 19, air inlet valve 20, etc.

[0025] The present invention uses a tubular filter to filter the chlorosilane liquid. The structure of the tubular filter adopts the Chinese utility model patent with the patent number 200820057362.4 and the patent name "a catalyst recovery filter".

[0026] Such as figure 1 Shown i...

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PUM

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Abstract

The invention relates to a method and a device for treating a chlorosilane liquid produced in polysilicon production. The method provided by the invention comprises the following step of feeding a chlorosilane liquid into a tube-type filter, carrying out filtration, discharging intercepted solid impurities into a closed slagging tank, feeding air into the closed slagging tank, and heating the closed slagging tank so that the solid impurities in the closed slagging tank undergo chemical reactions to produce silica powder and hydrogen chloride gas. The device provided by the invention comprisesthe tube-type filter with a liquid inlet, a liquid outlet and a slag removal opening. The slag removal opening is located at the bottom of the tube-type filter. The slag removal opening is communicated with the closed slagging tank located below the tube-type filter. The closed slagging tank is provided with an air inlet, a gas outlet and a fixing discharge opening. The fixing discharge opening is located at the bottom of the closed slagging tank. An auxiliary heating system is arranged outside the closed slagging tank. The device provided by the invention can realize filtration of a chlorosilane liquid by the tube-type filter, harmless treatment on filtered and intercepted solid impurities, high filtration efficiency, and environmentally friendly, safe and stable operation.

Description

technical field [0001] The invention relates to the production of polysilicon, in particular to a method and device for treating chlorosilane liquid in the production of polysilicon. Background technique [0002] Polysilicon is an important basic raw material for the development of microelectronics industry and solar energy industry today, and it is a high-tech product that spans multiple disciplines and fields such as chemical industry, metallurgy, machinery, and electronics. [0003] With the rapid development of the photovoltaic industry, the demand for polysilicon is increasing rapidly. As the world's largest consumer of polysilicon, China's domestic polysilicon supply has been in short supply. In recent years, many large-scale polysilicon projects have been built in China, and some relatively small-scale polysilicon projects that have been built are also expanding. The polysilicon industry has developed rapidly in recent years. [0004] Chlorosilane liquid is the most...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B33/18C01B7/03
Inventor 杨晓凯叶杰王翔何向阳
Owner FEATURE-TEC (WUXI) FILTRATION TECH CO LTD
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