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Double-sided polishing method for large-sized ultra-thin quartz glass sheets

A quartz glass sheet, double-sided polishing technology, applied to metal processing equipment, manufacturing tools, grinding devices, etc., can solve the problem of high damage rate and achieve the effect of improving efficiency and high yield

Inactive Publication Date: 2012-07-04
蔡桂芳
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Due to the rigidity of metal parts, no matter how thin or large they are, they will not be damaged. However, hard and brittle materials such as crystals have a diameter of several millimeters to 100 millimeters, and a thickness of more than 1mm. Therefore, there is no process operation problem, but when processing ultra-thin quartz glass The damage rate is particularly high in the grinding and polishing of wafers, so it is necessary to explore a set of special process operating procedures

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0013] Embodiment 1, a double-sided polishing processing method for a large-sized ultra-thin quartz glass sheet, the method is applicable to the grinding and polishing of a quartz glass sheet with a diameter Φ of 100-200mm and a thickness of 0.2-0.5mm;

[0014] (1) Clean the workpiece before processing the workpiece to remove the coarse-grained abrasives left in the previous processing, and filter the abrasives regularly to remove glass debris and coarse-grained abrasives;

[0015] (2) Fine grinding and polishing are carried out on the double-sided grinding and polishing machine of the same model, and all the processed parts after double-sided fine grinding are transferred to double-sided polishing, and the fine grinding parts processed in different times cannot be polished at the same time;

[0016] (3) When grinding, the grinding pressure is 0.01Mpa, the rotation speed is 6 / min, and the grinding time for each quartz glass piece is 50 min;

[0017] (4) During the grinding pro...

Embodiment 2

[0019] Embodiment 2, a double-sided polishing processing method for a large-sized ultra-thin quartz glass sheet, the method is suitable for grinding and polishing of a quartz glass sheet with a diameter Φ of 100-200mm and a thickness of 0.2-0.5mm;

[0020] (1) Clean the workpiece before processing the workpiece to remove the coarse-grained abrasives left in the previous processing, and filter the abrasives regularly to remove glass debris and coarse-grained abrasives;

[0021] (2) Fine grinding and polishing are carried out on the double-sided grinding and polishing machine of the same model, and all the processed parts after double-sided fine grinding are transferred to double-sided polishing, and the fine grinding parts processed in different times cannot be polished at the same time;

[0022] (3) When grinding, the grinding pressure is 0.03Mpa, the rotation speed is 8 / min, and the grinding time of each quartz glass piece is 80 min;

[0023] (4) During the grinding process, ...

Embodiment 3

[0025] Embodiment 3, a double-sided polishing processing method for a large-sized ultra-thin quartz glass sheet, the method is suitable for grinding and polishing of a quartz glass sheet with a diameter Φ of 100-200mm and a thickness of 0.2-0.5mm;

[0026] (1) Clean the workpiece before processing the workpiece to remove the coarse-grained abrasives left in the previous processing, and filter the abrasives regularly to remove glass debris and coarse-grained abrasives;

[0027] (2) Fine grinding and polishing are carried out on the double-sided grinding and polishing machine of the same model, and all the processed parts after double-sided fine grinding are transferred to double-sided polishing, and the fine grinding parts processed in different times cannot be polished at the same time;

[0028] (3) When grinding, the grinding pressure is 0.02Mpa, the rotation speed is 7 / min, and the grinding time of each quartz glass piece is 65 min;

[0029] (4) During the grinding process, ...

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Abstract

The invention relates to a double-sided polishing method for large-sized ultra-thin quartz glass sheets, which is applicable to grinding and polishing quartz glass sheets with the diameters phi ranging from 100mm to 200 mm and the thickness ranging from 0.2mm to 0.5mm. Workpieces are cleaned before being machined, and are finely ground and polished on a double-sided grinding and polishing machine in the same type, grinding pressure during grinding ranges from 0.01Mpa to 0.03Mpa, rotation speed ranges from 6 revolutions per minute to 8 revolutions per minute, and each quartz glass sheet is ground for 50 minutes to 80 minutes. During grinding, a moving star wheel of the double-side grinding and polishing machine keeps flat; and the workpieces are cleaned by the aid of ultrasonic waves after being machined, and are soaked in mixed liquor of alcohol and diethyl ether with the mass ratio of 1:1 for 2 minutes to 3 minutes, and finished products are obtained. The process guarantees high yield of the machined workpieces, efficiency is improved, and yield of the machined workpieces can reach about 97%.

Description

technical field [0001] The invention relates to a processing method for a quartz glass sheet, in particular to a double-sided polishing processing method for a large-sized ultra-thin quartz glass sheet. Background technique [0002] With the rapid development of science and technology, the double-sided polishing and grinding of valve plates, oil pump blades, cylinder piston rings, steel sealing rings and other metal parts used in the precision machinery industry and the hard and The demand for double-sided grinding and polishing of metal parts is increasing rapidly. In order to meet this demand, the machinery manufacturing industry has produced planetary double-sided grinding and polishing machines of various specifications and models to meet the above requirements. Due to the rigidity of metal parts, no matter how thin or large they are, they will not be damaged. However, hard and brittle materials such as crystals have a diameter of several millimeters to 100 millimeters,...

Claims

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Application Information

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IPC IPC(8): B24B37/08
Inventor 蔡桂芳费立格刘梦云王晓东
Owner 蔡桂芳