Method for fabricating three-dimensional optical echo wall mode micro-cavity by using femtosecond laser

A whispering gallery mode, femtosecond laser technology, used in laser welding equipment, manufacturing tools, welding equipment, etc., can solve the problems of low quality factor and poor durability of microcavity, achieve high quality factor, improve roughness, reduce effective Effect of Mode Volume

Inactive Publication Date: 2012-07-04
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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Problems solved by technology

[0004] The technical problem to be solved by the present invention is to overcome the above-mentioned existing femtosecond laser micromachining technology that can only prepare microcavities on polymers, and the prepared microcavities have low quality factors and poor durability,

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  • Method for fabricating three-dimensional optical echo wall mode micro-cavity by using femtosecond laser
  • Method for fabricating three-dimensional optical echo wall mode micro-cavity by using femtosecond laser
  • Method for fabricating three-dimensional optical echo wall mode micro-cavity by using femtosecond laser

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Embodiment Construction

[0025] The present invention will be further described below through the examples and accompanying drawings, but the protection scope of the present invention should not be limited by this.

[0026] see first figure 1 , figure 1 It is a schematic flow chart of the method for preparing a three-dimensional optical whispering gallery mode microcavity with a high quality factor by using a femtosecond laser in the present invention. Now, the method of the present invention is illustrated by taking quartz glass as an example. It can be seen from the figure that the present invention uses a femtosecond laser to prepare a three-dimensional The method of the optical whispering gallery mode microcavity includes the following three steps:

[0027] (1) Femtosecond laser irradiation: take a quartz glass sample 4 with a size of 10mm×5mm×1mm and polish the upper and lower surfaces, clean it with absolute ethanol and fix it on a three-dimensional displacement platform; the femtosecond laser ...

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Abstract

The invention discloses a method for fabricating a three-dimensional optical echo wall mode micro-cavity with high-quality factors by using femtosecond laser. The method comprises the following steps of femtosecond laser irradiation on a transparent material, chemical corrosion, carbon dioxide laser annealing and the like. According to the three-dimensional optical echo wall mode micro-cavity, fabricated according to the method disclosed by the invention, the size of a small support column, the size of a micro disc, and included angles of the small support column and the micro disc relative to a substrate are determined by a design. The profile of the micro-cavity is of a micro ring structure, the surface finish quality is extremely high, and the quality factors are very high.

Description

technical field [0001] The invention relates to femtosecond laser processing, in particular to a method for preparing a three-dimensional optical whispering gallery mode microcavity by using femtosecond laser. The method is suitable for preparing three-dimensional optical whispering gallery mode microcavities in various transparent glasses, crystals and ceramics. Background technique [0002] The optical whispering gallery mode (whispering-gallery mode) microcavity confines light in a small volume for a long time through continuous multiple total internal reflections at the circular boundary between the dielectric cavity and the surrounding environment, and has a fairly high quality factor , in basic research and engineering applications, such as quantum optics, nonlinear optics, quantum electrodynamics, low-threshold lasers, extremely small filters, biosensors, optical frequency combs, etc., have important applications. And the microcavity of the whispering gallery mode on...

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Application Information

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IPC IPC(8): B81C99/00B23K26/36B23K26/00B23K26/55
Inventor 林锦添程亚何飞乔玲玲徐至展
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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