Gas chromatography detection system and method for analyzing trace impurities in ultrahigh pure gas

Abstract

The invention relates to detection equipment and technology for a gas chromatography instrument, in particular to a gas chromatography detection system and method for analyzing trace impurities in ultrahigh pure gas. A first molecular sieve chromatographic column (51) is arranged between a switching valve VI (1) and a switching valve VII (2); a second molecular sieve chromatographic column (52) is arranged between a switching valve VII (2) and a switching valve VIV (4); and a second column separator (62) is arranged between the switching valve VIII (3) and switching valve VIV (4). A secondary sampling way is adopted for sample gas, and a main component is pre-cut during primary sample feeding of a ten-way switching valve VI (1) and subjected to back flushing during secondary sample feeding of the ten-way switching valve VI (1); and the main component is separated and switched, and enters a helium ion detector (8) for analyzing. The gas chromatography detecting system is controlled through each valve, the sequence of actions is executed by using an event draw-up program, the entire analyzing process is controlled automatically, actions are rapid, consistent and reliable, and the data repeatability and accuracy of the system are ensured through a stable flow gas channel and accurate valve switching.

Description

technical field [0001] The invention relates to a gas chromatograph detection device and detection technology, in particular to a gas chromatographic detection system and method for analyzing trace impurities in ultra-high-purity gas. Background technique [0002] At present, domestic gas chromatographs used for high-purity gas analysis generally use traditional TCD and FID or zirconia detectors; most of their detectors have traditional or backward technologies, and are highly selective for the analysis of impurities in gases. A gas often requires multiple chromatographic analysis, and the analysis process is simple and the analysis components are repeated. The system does not have high requirements for the gas path, which greatly reduces the detection sensitivity of the system; There are as many as 5-6 chromatographic separation columns; and the gas path connection between the multi-dimensional chromatographic columns needs to be realized by a special switching valve; espec...

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Problems solved by technology

[0004] The present invention aims at the conventional or outdated conventional gas chromatograph detector technology in the prior art, and has strong selectivity for the analysis of impurities in the gas. A gas often requires multiple chromatographic analysis, and the analysis process is simple and the analysis components are repeated. , the system does not have high requirements on the gas path, which greatly reduces the detection sensitivity of the system. Provides an ultra-high-purity gas analysis chromatographic process that can complete the analysis of all impurity components in ultra-high-purity gas by switching the gas path through the second sample injection. process

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