Sub-wavelength self-focusing radial polarization vertical-cavity surface-emitting laser and preparation method thereof
A vertical cavity surface emission, laser technology, applied in lasers, laser parts, semiconductor lasers, etc., can solve the problems of limited application, large volume, complexity and so on
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[0020] see figure 2 , the present invention provides a sub-wavelength self-focusing radially polarized vertical cavity surface emitting laser, comprising:
[0021] A vertical cavity surface-emitting laser 2, one side of which is made with a P-surface electrode 3, the middle of the annular part of the P-surface electrode 3 is a light-emitting surface 31, and the size of the electrode should be designed according to the oxidation aperture of the laser to ensure uniform current injection;
[0022] An N-surface electrode 1, the N-surface electrode 1 is fabricated on the other surface of the VCSEL 2;
[0023] A dielectric film 4, which is made on the light-emitting surface 31 of the P-face electrode 3, the material of the dielectric film 4 is SiO 2 、SiN x 、Al 2 o 3 、TiO 2 or ZrO 2 , the thickness is 1 / 4 of the laser wavelength, and the thickness of the grown dielectric film 4 can modulate the phase of the transmission electric field and enhance the laser transmission. At th...
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