Plasma processing device
一种等离子体、处理装置的技术,应用在离子体处理装置领域,能够解决膜损伤变大、膜质下降等问题,达到膜质提高、提高天线长度的效果
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[0080] An embodiment of the plasma processing apparatus of the present invention is shown in figure 1 , And the antenna 30 is taken out and shown in Fig. 2(A), Fig. 2(B), and Fig. 2(C). In order to indicate the directions of the antenna 30 and the like, the X direction, the Y direction, and the Z direction that are orthogonal to one point are described in the figure. The Z direction is the direction in which the vertical line 3 standing on the surface of the substrate 2 is expanded and contracted, and the Y direction is the direction intersecting (for example, orthogonal to) the vertical line 3, and in order to simplify the expression as described above, the directions are respectively referred to as Up and down direction Z, left and right direction Y. The X direction is a direction crossing (for example, orthogonal) to the vertical line 3 and is the length direction of the antenna 30. For example, the X direction and the Y direction are horizontal directions, but they are not...
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