Method for operating an industrial process

Abstract

The invention relates to a method for operating a plasma system, an induction heating system, or a laser excitation system in a pulsed power output mode, wherein a first power POUT1.1 is generated in a power output time period [delta]T1, and is output at a power output of a power generator for providing power to a plasma process, of an induction heating process, or of a laser excitation process, and no power POUT2.1 suitable for igniting or operating a plasma process, an induction process, or a laser excitation process is output at the power output of the power generator in a pulse pause time period [delta]T2, in that at least one semiconductor circuit element (9) of the power generator is actuated, wherein a first loss power PV1 is generated in the at least one semiconductor circuit element (9) at the same time as the generation of the first power Pout1.1 during the power output time period [delta]T1, and a second loss power PV2 is generated in the at least one semiconductor element (9) during the pulse pause time period [delta]T2, and the generated loss powers PV1, PV2 are converted into heat, wherein a drop in temperature of the semiconductor circuit element (9) by greater than a predefined value is prevented by suitably actuating the semiconductor circuit element, and the power output mode and the pulse pause mode alternate continuously.

Description

technical field [0001] The invention relates to a method for operating a plasma device, an induction heating device or a laser excitation device. Background technique [0002] To generate AC power, especially high-frequency power, for industrial processes such as induction heating or plasma excitation or excitation of gas lasers, AC power generation devices with amplifier tubes are still often used at high power levels. This is due in particular to the robust behavior of the amplifier tube against rapid load changes. However, such an AC power generating device having an amplifier tube has a low level of efficiency, and the amplifier tube suffers losses. Therefore, attempts have been increasingly made to replace these AC power generating devices with devices operating with semiconductor switching elements. These semiconductor switching elements can be transistors, for example. Power levels up to about 500W per transistor can be generated with currently available transistor...

AI Technical Summary

Problems solved by technology

However, between two stages of power operation, there is cooling, which causes further mechanical tension

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