Minitype piezoelectric electret functional thin film preparation device
A piezoelectric electret and thin film preparation technology, which is applied in the manufacture/assembly of piezoelectric/electrostrictive devices, etc., can solve the problem that the mechanical properties and charge storage capacity of the microporous structure membrane cannot be effectively controlled, and the thin film microstructure Difficult to precisely control and other issues, to achieve the effect of convenient and flexible replacement, high yield rate, and simple process
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Embodiment 1
[0026] Using stainless steel as the base material and rotary vane vacuum pump to prepare such as figure 2 The small piezoelectric electret film device shown. Such as figure 2 As shown, the upper part of the metal seat 6 is provided with a cavity 7, one side of the cavity 7 is connected to the vacuum pump 11 through a conduit 10, the lower part of the cavity 7 is provided with a heating plate 8, and the top of the cavity 7 is provided with a template 9, which is detachable. It is fixed on the metal base 6 with rivets; the heating plate 8 and the conduit 10 are fixed on the metal base 6 and cannot be disassembled. Template 9 is structured as image 3 As shown, it is composed of template punching holes 12 and template base body 13, the template base body 13 is in a circular structure, and template punching holes 12 are evenly distributed thereon; as Figure 5 As shown, the two sub-film preparation devices are placed up and down, the polymer films on them are placed opposite ...
Embodiment 2
[0029] Using stainless steel as the base material and rotary vane vacuum pump to prepare such as figure 2 The small piezoelectric electret film device shown. The thickness of the first template and the second template is 2mm, the diameter of the template is 6cm, and the punching hole is The square hole, the distance between adjacent punching holes is 0.5mm. The first polymer film 14 is a 25um thick polypropylene (PP) film, and the second polymer film 15 is a 12.5um thick FEP film. Temperature 1, vacuum degree 1 and vacuum time 1 are respectively 90 o C, 6Pa and 5min; temperature 2, vacuum degree 2 and vacuum time 2 are 180 o C, and 10min. Electropolarization treatment was carried out on the prepared film by contact method and 3000kV DC voltage, and aluminum electrode was covered by vacuum evaporation method. The quasi-static piezoelectric coefficient of the final PP / FEP composite piezoelectric electret film d 33 It is 300pC / N.
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