Minitype piezoelectric electret functional thin film preparation device

A piezoelectric electret and thin film preparation technology, which is applied in the manufacture/assembly of piezoelectric/electrostrictive devices, etc., can solve the problem that the mechanical properties and charge storage capacity of the microporous structure membrane cannot be effectively controlled, and the thin film microstructure Difficult to precisely control and other issues, to achieve the effect of convenient and flexible replacement, high yield rate, and simple process

Inactive Publication Date: 2013-11-13
TONGJI UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The methods for preparing microporous polymer films by traditional techniques include chemical foaming process, and polymer-inorganic microparticle melt blending extrusion stretching process. The advantage is that it can be produced continuously, but the disadvantage is that the microstructure of the film is difficult to accurately Furthermore, the mechanical properties and charge storage capacity of microporous membranes cannot be effectively controlled.

Method used

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  • Minitype piezoelectric electret functional thin film preparation device
  • Minitype piezoelectric electret functional thin film preparation device
  • Minitype piezoelectric electret functional thin film preparation device

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0026] Using stainless steel as the base material and rotary vane vacuum pump to prepare such as figure 2 The small piezoelectric electret film device shown. Such as figure 2 As shown, the upper part of the metal seat 6 is provided with a cavity 7, one side of the cavity 7 is connected to the vacuum pump 11 through a conduit 10, the lower part of the cavity 7 is provided with a heating plate 8, and the top of the cavity 7 is provided with a template 9, which is detachable. It is fixed on the metal base 6 with rivets; the heating plate 8 and the conduit 10 are fixed on the metal base 6 and cannot be disassembled. Template 9 is structured as image 3 As shown, it is composed of template punching holes 12 and template base body 13, the template base body 13 is in a circular structure, and template punching holes 12 are evenly distributed thereon; as Figure 5 As shown, the two sub-film preparation devices are placed up and down, the polymer films on them are placed opposite ...

Embodiment 2

[0029] Using stainless steel as the base material and rotary vane vacuum pump to prepare such as figure 2 The small piezoelectric electret film device shown. The thickness of the first template and the second template is 2mm, the diameter of the template is 6cm, and the punching hole is The square hole, the distance between adjacent punching holes is 0.5mm. The first polymer film 14 is a 25um thick polypropylene (PP) film, and the second polymer film 15 is a 12.5um thick FEP film. Temperature 1, vacuum degree 1 and vacuum time 1 are respectively 90 o C, 6Pa and 5min; temperature 2, vacuum degree 2 and vacuum time 2 are 180 o C, and 10min. Electropolarization treatment was carried out on the prepared film by contact method and 3000kV DC voltage, and aluminum electrode was covered by vacuum evaporation method. The quasi-static piezoelectric coefficient of the final PP / FEP composite piezoelectric electret film d 33 It is 300pC / N.

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Abstract

The invention relates to a minitype piezoelectric electret functional thin film preparation device which is formed by the combination of two sub thin film preparation devices, wherein each sub thin film preparation device consists of a metal base, a cavity, a heating plate, a mold board, a guide pipe and a vacuum pump; the upper part of the metal base is provided with the cavity; one side of the cavity is connected with the vacuum pump through the guide pipe; the lower part of the cavity is provided with the heating plate; the top of the cavity is provided with the mold board; a polymer thin film is placed on the mold board; the mold board consists of mold board punching holes and a mold board base body; the mold board base body is of a circular structure, and the mold board punching holes are uniformly distributed on the mold board base body; the sub thin film preparation devices are placed up and down, and the polymer thin films positioned on the sub thin film preparation devices are oppositely placed; and the mold board punching holes positioned on the two sub thin film preparation devices are in one-to-one correspondence. The minitype piezoelectric electret functional thin film preparation device provided by the invention is simple in structure, mold board units can be replaced conveniently and flexibly, and the upper and lower mold boards are positioned accurately. The micro hole structure piezoelectric electret thin film prepared by the invention is stable in mechanical structure, the micro structure heights are in order, the dispersion property of the thin film performance is low, and the rate of finished products is high.

Description

technical field [0001] The invention relates to a small piezoelectric electret functional thin film preparation device, which belongs to the technical field of functional materials. Background technique [0002] Piezoelectrets (or ferroelectrets) are a class of microporous structure space charge electrets (electrets) materials with electromechanical energy conversion capabilities (ie piezoelectric effect), and are a class of artificial intelligence Material. The piezoelectric effect of piezoelectric electret materials is derived from the long-term storage capacity of space charge in the solid phase substrate and the extremely deformable mechanical properties of gas phase micro-voids. Unlike traditional piezoelectric crystals, piezoelectric ceramics, or ferroelectric polymer films (such as PVDF), piezoelectric electret materials have no inherent electric dipoles, and there is no inherent electric dipole orientation. The material is a non-polar polymer. figure 1 It is a sch...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L41/45
Inventor 张晓青张欣梧娄可行游琼
Owner TONGJI UNIV
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