Nano-thermoelectric multi-parameter in-situ quantitative characterization device based on atomic force microscope

An atomic force microscope and in-situ quantitative technology, which is applied in measuring devices, nanotechnology, scanning probe microscopy, etc., can solve the problem that the test method is static, cannot reflect the dynamic performance change state of thermoelectric materials, and cannot achieve real-time and synchronous detection And other issues

CN102692427AActive Publication Date: 2012-09-26江苏先进无机材料研究院
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Publication Date
2012-09-26

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Abstract

The invention relates to a nano-thermoelectric energy material multi-parameter in-situ quantitative characterization device based on an atomic force microscope, which is used for detecting a micro-area heat conduction coefficient, a Seebeck coefficient and other thermoelectric property parameters of a detected nano-thermoelectric material sample. The device comprises a nano-thermoelectric multi-parameter atomic force microscope in-situ excitation platform and a nano-thermoelectric multi-parameter in-situ detection platform, wherein the nano-thermoelectric multi-parameter atomic force microscope in-situ excitation platform is used for providing a basic hardware platform required in nano-thermoelectric multi-parameter excitation and realizing in-situ simultaneous excitation of a micro-area frequency-tripled heat conduction signal and a micro-area stable-state Seebeck direct current voltage signal of a nano-thermoelectric material; and the nano-thermoelectric multi-parameter in-situ detection platform is used for realizing in-situ real-time detection and data processing of micro-area heat conduction and Seebeck voltage of the nano-thermoelectric material and realizing real-time display of the quantitative characterization results of the micro-area heat conduction coefficient and the Seebeck coefficient. According to the device disclosed by the invention, the nano-detection function of the atomic force microscope, the frequency tripling detection principle of macro-heat conductivity and the test principle of the macro-Seebeck coefficient are combined for establishing a nano in-situ evaluation device which is based on the commercial atomic force microscope and combines the properties of nano-scale heat excitation and thermoelectric multi-parameter detection.
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Description

technical field

[0001] The application relates to a multi-parameter in-situ quantitative characterization device for nanometer thermoelectric materials based on an atomic force microscope, which belongs to the field of signal detection instruments. Background technique

[0002] As an important strategic energy material, thermoelectric materials have very broad application prospects in many important fields such as microelectronics, optoelectronics, deep space exploration, national defense and military industry, and energy conservation and environmental protection. At present, the main obstacle restricting the wide application of thermoelectric materials is their low thermoelectric conversion efficiency. Nanotechnology has opened up a new way for the development of high-performance thermoelectric materials. As a result, nano-thermoelectric materials have become the most active and promising research field in the current international thermoelectric field, and the measurement ...

Examples

Embodiment 1

[0048] The nano-thermoelectric multi-parameter in-situ quantitative characterization technology established in this application was used to test the micro-region thermal conductivity of the Bi-Sb-Te thermoelectric thin film, and Figure 6 shows the test results. Among them, Figure 6(a) is the AFM image of the surface topography of the sample, and Figure 6(b) is the micro-area triple frequency of the three measurement points obtained in situ in the corresponding area of ​​the sample by the established nano-thermoelectric multi-parameter in-situ quantitative characterization technique The relationship between the thermal conductance signal and the logarithm of the excitation frequency. According to the near-field thermal imaging conditions, the microscopic thermal conductivity can be calculated as λ=1.668W / (m·K). Since the macroscopic thermal conductivity test technology of thin film has not been satisfactorily resolved so far, it is impossible to compare the thermal conductivity...

Embodiment 2

[0050]The micro-region Seebeck coefficient of the Bi-Sb-Te thermoelectric thin film was tested by applying the nano-thermoelectric multi-parameter in-situ quantitative characterization technology established in this application. Figure 7 shows the test results. It must be pointed out that the results are consistent with those in Figure 8 Results obtained simultaneously in situ during thermoelectric characterization of micro-domains. Figure 7(a) shows the test results of the probe voltage under different excitation voltages, and Figure 7(b) shows the test results of the Seebeck voltage under different excitation voltages. According to the specific thermistor characteristics of the thermal probe and the balance characteristics of the thermoelectric circuit bridge, the temperature of the probe under different excitation voltages can be calculated from Figure 7(a), which corresponds to the temperature of the micro-region of the thermoelectric film. Thus, according to the calculate...