Thermocouple device for polycrystal ingot furnace

A technology of polycrystalline ingots and thermocouples, applied in the direction of using electrical devices, measuring devices, polycrystalline material growth, etc., can solve the problems of high equipment maintenance costs and an average life span of only half a year, and achieve the effect of extending the service life

Inactive Publication Date: 2012-10-03
HUNAN RED SUN PHOTOELECTRICITY SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] Almost all polysilicon ingot furnace thermocouples in actual production are imported, but th

Method used

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  • Thermocouple device for polycrystal ingot furnace
  • Thermocouple device for polycrystal ingot furnace

Examples

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Embodiment 1

[0018] like figure 1 As shown, the thermocouple chamber includes a reducing tee 2, a thermocouple joint 1 sealed and fixed at one end of the reducing tee 2, and an alumina ceramic tube 6 fixed in the reducing tee 2 through a ceramic tube fixing seat 5 , the thermocouple 4 fixed in the alumina ceramic tube 6 through the thermocouple holder 3; wherein, the thermocouple 4 is connected to the thermocouple joint 1; the reducing tee 2 is connected to the pipeline branch fitting 8, and the pipeline branch The pipe fitting 8 is connected to the tee pipe 11 through the vacuum hose 10, the tee pipe 11 is connected to the vacuum shut-off valve 13, and the B interface of the vacuum shut-off valve 13 is connected to the vacuum unit; the branch pipe fitting 8 of the pipeline is connected with a vacuum deflation Valve 9; wherein, the pipeline branch fitting 8 is a four-way pipe, and the spare A interface on it is connected to another thermocouple chamber; the three-way pipe 11 is connected w...

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PUM

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Abstract

The invention discloses a thermocouple device for a polycrystal ingot furnace. The thermocouple device is a constituent part of a polycrystal ingot furnace temperature control system, and comprises a thermocouple cabin, wherein the thermocouple cabin comprises a reducing T-joint, a thermocouple joint, an aluminum oxide ceramic tube and a thermocouple, wherein the thermocouple joint is hermetically fixed at one end of the reducing T-joint; the aluminum oxide ceramic tube is hermetically fixed in the reducing T-joint through a ceramic tube fixing base; the thermocouple is fixed in the aluminum oxide ceramic tube through the thermocouple fixing base, and is connected with the thermocouple joint; the reducing T-joint is connected with a pipeline branch tube fitting; the pipeline branch tube fitting is connected with a three-way tube through a vacuum hose; the three-way tube is connected with a vacuum cutoff valve; the vacuum cutoff valve is connected with a vacuum unit; and a vacuum deflation valve is connected to the pipeline branch tube fitting. Due to the adoption of the device disclosed by the invention, the service life of the thermocouple can be prolonged greatly, and a hearth is protected when the aluminum oxide ceramic tube is fractured and leaks air accidentally.

Description

technical field [0001] The invention relates to a thermocouple device, in particular to a polycrystalline ingot furnace thermocouple device. Background technique [0002] Polysilicon ingot casting furnace is a device for casting large polysilicon ingots. It melts silicon material at high temperature and crystallizes it through directional solidification and condensation to form silicon ingots with consistent crystal orientation, so as to meet the quality requirements of silicon wafers for solar cell production. [0003] The main production process of polysilicon ingot is: put the polysilicon material into the coated quartz crucible and put it on the directional solidified block, close the furnace and start the vacuum system, pump the furnace to the background vacuum, and then heat it. After the silicon material is completely melted, the heat insulation cage is slowly lifted up, and the furnace temperature is slowly lowered, so that a horizontal temperature interface that ca...

Claims

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Application Information

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IPC IPC(8): C30B11/00C30B28/06C30B29/06G01K7/02
Inventor 瞿海斌陈国红罗志高谭晓松蒋益民
Owner HUNAN RED SUN PHOTOELECTRICITY SCI & TECH
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